“…Saha and Nix observed a reduced hardness with an increase in the penetration depth in the case of a hard film on a soft substrate [24]. Basically, the substrate has an effect on the H and E values obtained by nanoindentation, which are directly related to the expansion of the elastically and plastically deformed volume underneath the indenter during the loading phase [25]. This critical depth normalized by the film thickness may vary between 0.05 and 0.2 [25].…”