2015
DOI: 10.1016/j.sse.2015.05.029
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Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts

Abstract: , M. et al. (2015) Nanoelectromechanical digital logic circuits using curved cantilever switches with amorphous-carbon-coated contacts Abstract Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low-power digital electronics. This paper reports the demonstration of prototype circuits including the first 3-stage ring oscillator built using cell-level digital logic elements based on curved NEM switches. The ring oscillator core oc… Show more

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Cited by 11 publications
(7 citation statements)
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“…This configuration can be realized, for example, by a ''via-last'' heterogeneous 3-D integration process as outlined in Fig. 2, in which the silicon device layer of a silicon-on-insulator (SOI) wafer is transferred to a wafer containing a metal interconnect stack (and CMOS circuits where required) from a standard CMOS foundry offering [13], [16]. Consequently, vias 1 and NEM relays are formed.…”
Section: Technology Platform and Modelingmentioning
confidence: 99%
See 1 more Smart Citation
“…This configuration can be realized, for example, by a ''via-last'' heterogeneous 3-D integration process as outlined in Fig. 2, in which the silicon device layer of a silicon-on-insulator (SOI) wafer is transferred to a wafer containing a metal interconnect stack (and CMOS circuits where required) from a standard CMOS foundry offering [13], [16]. Consequently, vias 1 and NEM relays are formed.…”
Section: Technology Platform and Modelingmentioning
confidence: 99%
“…Such integration of NEM relay circuits can be achieved by approaches that can be collectively [12]. classified as monolithic integration [7]- [11], or heteogeneous integration [12], [13].…”
Section: Introductionmentioning
confidence: 99%
“…Functional digital gates and circuits based on in-plane as well as out-of-plane relays have also been reported [8,9]. While stiction in the contact and overall reliability are major issues, significant progress has been made [10].…”
Section: Introductionmentioning
confidence: 99%
“…A combination of these proposed NEMS switches has been shown to perform the NOR/XOR/NAND and an inverter. Similarly, curved cantilevers are proposed in [20] to realize a single stage inverter and buffer.…”
mentioning
confidence: 99%