Nanoelectromechanical Disk Resonators as Highly Sensitive Mass Sensors

Qaradaghi, Vahid; Ramezany, Alireza; Babu, Sachin; Lee, Jeong; Pourkamali, Siavash

doi:10.1109/led.2018.2871754

Cited by 9 publications

(5 citation statements)

References 15 publications

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“…In piezoresistive sensing configurations [ 105 , 106 , 107 , 108 , 109 ], all surrounding electrodes can be used for capacitive actuation because the motional current is picked up from the body of the resonator. Besides this, the motion signal can be increased by tuning V d rather than shrinking the transduction gap or increasing the applied actuation voltage, but it is limited to the piezoresistive coefficient of the single crystal silicon and the dissipation of the electric power of the resonator.…”

Section: Coupled Baw Resonators With Different Transduction Methodsmentioning

confidence: 99%

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Wang

et al. 2022

Sensors

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With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.

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Section: Coupled Baw Resonators With Different Transduction Methodsmentioning

confidence: 99%

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

Wang

et al. 2022

Sensors

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“…1(b). Theoretical derivations on TPR are described in [10], [14]. In summary, the movement of a TPR results from the periodical thermal expansion/contraction of the nanobeam.…”

Section: A Thermal-piezoresistive Principlementioning

confidence: 99%

“…Recently, thermal-actuation and piezoresistive-detection principles have been demonstrated as beneficial to pump the effective quality factor (Q eff ) [8] in air. A variety of mass sensors based on thermalpiezoresistive resonators (TPR) have been reported [9], [10]. Increasing the bias direct current (I dc ) is the typical way of pumping Q eff The authors are with the Department of Electrical Engineering (ESAT)-MNS, KU Leuven, 3001 Leuven, Belgium (e-mail: hemin.zhang@kuleuven.be; chen.wang@kuleuven.be).…”

Section: Introductionmentioning

confidence: 99%

On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Zhang

Quan

Wang

et al. 2022

J. Microelectromech. Syst.

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Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting better mass sensing performance in air. In this paper, frequency resolution (bias instability) of a thermal-piezoresistive resonator operating in air at room temperature is experimentally investigated. It is found that the dynamic range decreases when increasing the bias direct current whereas the effective quality factor rises. The measurement results indicate a maximum effective quality factor of 169k with a dynamic range of 47.8 dB for a bias current of 6.25 mA, and a minimum effective quality factor of 11.3k with a dynamic range of 70.1 dB for a bias current is 5.8 mA. Our work also shows that the frequency and amplitude bias instabilities are significantly lower due to the dynamic range decrease for a high bias current.[2021-0250]

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“…Nanoelectromechanical system (NEMS) resonators, well known for their extremely high frequencies, excellent mechanical responsivity and large quality factors [1], are widely used in highly efficient low-noise transducers [2] and ultra-sensitive sensors [3]. In contrast to their MEMS counterparts, they inherently exhibit rich nonlinear dynamics, including chaos and bifurcation [4,5].…”

Section: Introductionmentioning

confidence: 99%

Nonlinear dynamic control of GaAs nanomechanical resonators using lasers

Jin

Zhao

et al. 2021

Nanotechnology

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The ability to control, manipulate, and read out nanomechanical resonators is of great significance for many applications. In this work, we start by constructing a nonlinear dynamic model that is deduced from the fundamental beam-photon–electron interaction and energy band theories, with the aim of describing a complicated cavity-free optomechanical coupling process. Based on the model established, we first reveal the manipulation of a resonator’s response, including softening and hardening effects due to laser injection. By driving the laser parametrically, we comprehensively investigate the control of the resonator’s dynamics, in particular, in the nonlinear regime. It is found that both the laser power and frequency can be used to directly manipulate the NEMS resonator’s dynamics, e.g., by amplitude amplification, periodicity changes, and periodic–chaotic state conversion. We then provide bifurcation diagrams, which evidence a deterministic evolution of dynamics. Finally, we perform a special study of the control of chaotic states of the nanomechanical resonator using laser parametric driving. The maximal Lyapunov exponents together with time series calculation show that the chaotic states can be controlled at a few specific frequency points of the injecting laser. This work not only provides guidance for using lasers to control nanoscale resonators, but also sheds light on the exploration of novel applications based on nonlinear NEMS resonators.

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Nanoelectromechanical Disk Resonators as Highly Sensitive Mass Sensors

Cited by 9 publications

References 15 publications

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

A Review on Coupled Bulk Acoustic Wave MEMS Resonators

On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors

Nonlinear dynamic control of GaAs nanomechanical resonators using lasers

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