Nanoelectromechanical Temperature Sensor Based on Piezoresistive Properties of Suspended Graphene Film

Abstract

The substrate impurities scattering will lead to unstable temperature-sensitive behavior and poor linearity in graphene temperature sensors. And this can be weakened by suspending the graphene structure. Herein, we report a graphene temperature sensing structure, with suspended graphene membranes fabricated on the cavity and non-cavity SiO2/Si substrate, using monolayer, few-layer, and multilayer graphene. The results show that the sensor provides direct electrical readout from temperature to resistance transduction by the nano piezoresistive effect in graphene. And the cavity structure can weaken the substrate impurity scattering and thermal resistance effect, which results in better sensitivity and wide-range temperature sensing. In addition, monolayer graphene is almost no temperature sensitivity. And the few-layer graphene temperature sensitivity, lower than that of the multilayer graphene cavity structure (3.50%/°C), is 1.07%/°C. This work demonstrates that piezoresistive in suspended graphene membranes can effectively enhance the sensitivity and widen the temperature sensor range in NEMS temperature sensors.

柔性触觉传感电子皮肤研究进展

“…(a) 石墨烯柔性温度触觉传感电子皮肤的结构图. (b) 石墨烯柔性温度触觉传感电子皮肤温度检测 机理 Figure 5 Thermoresistive flexible tactile electronic skin for temperature sensing [116] . (a) Basic structure of graphene-based thermoresistive flexible tactile electronic skin for temperature sensing.…”

Suspended 2D Materials: A Short Review

“…One prominent application lies in electronic devices, including FETs [41,60,61], logic gates [62,63], photodetectors [64][65][66][67][68], resonators [69][70][71][72], and sensors [73][74][75][76][77][78]. For instance, Han et al demonstrated that incorporating piezoresistive properties in suspended graphene membranes enhances sensitivity and expands the temperature-sensing range in nanoelectromechanical system (NEMS) temperature sensors [129]. In the case of pressure sensors, the working mechanism relies on the local compression deformation of the suspended graphene lattice.…”