2004
DOI: 10.1088/0957-4484/15/10/015
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Nanoengineered device for drug delivery application

Abstract: A high precision nanoengineered device was developed to yield long term zero-order release of drugs for therapeutic applications. The device contains nanochannels that were fabricated in between two directly bonded silicon wafers and therefore poses high mechanical strength. The fabrication is based upon selectively growing oxide and then removing it, and thus defining nanochannels by consuming a specified layer of silicon during oxide growth. Diffusion through the nanochannels is the rate limiting step for th… Show more

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Cited by 100 publications
(69 citation statements)
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“…If nanoscale patterning techniques are used instead to pattern the 2D templates, it will be possible to pattern nanoporous faces, thereby generating 3D nanoporous containers that will allow highly selective bidirectional diffusion of molecules. We envision the use of several nanoscale patterning techniques including conventional nano lithography (Wallraff and Hinsberg, 1999) and novel methods that include selective etching, electrochemical etching and soft-lithography (Sinha et al, 2004;Gates et al, 2005).…”
Section: Discussionmentioning
confidence: 99%
“…If nanoscale patterning techniques are used instead to pattern the 2D templates, it will be possible to pattern nanoporous faces, thereby generating 3D nanoporous containers that will allow highly selective bidirectional diffusion of molecules. We envision the use of several nanoscale patterning techniques including conventional nano lithography (Wallraff and Hinsberg, 1999) and novel methods that include selective etching, electrochemical etching and soft-lithography (Sinha et al, 2004;Gates et al, 2005).…”
Section: Discussionmentioning
confidence: 99%
“…These applications were facilitated by the significant increase in the range of advanced nanofabrication techniques. Nanochannels are fabricated using bulk [13][14][15][16][17][18][19] and surface [1,12,[20][21][22][23][24][25] nanomachining, buried channel method [26], chemicalmechanical polishing, and thermal oxidation [27]. Other fabrication methods are based on electron beam [28] and interferometric [29,30] lithography or self-assembly patterning [31,32].…”
Section: Introductionmentioning
confidence: 99%
“…Synthetic nanopores and nanochannels have attracted extensive attention due to their large range of potential applications in biosensing, targeted drug delivery, separation of molecules and mimicry of biological channels [1][2][3][4][5]. Compared to biological nanopores [6,7], synthetic nanopores possess the advantages including stability, control over pore shape, diameter and the pore surface properties [1]; therefore they are more suitable for various complex external environments.…”
Section: Introductionmentioning
confidence: 99%