Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)

Ortlepp, Ingo; Stauffenberg, Jaqueline; Krötschl, Anja; Донцов, Д. В.; Zöllner, Jens-Peter; Hesse, Steffen; Reuter, Christoph; Strehle, Steffen; Fröhlich, Thomas; Rangelow, Ivo W.; Manske, Eberhard

doi:10.1117/12.2615118

Cited by 4 publications

(4 citation statements)

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“…On the NFM-100, this tool is used for the exposure of Calixarene resists as this allows a seamless fabrication and inspection process over several millimeters without the need for stitching. 56 For demonstrating a long-range FE-SPL exposure, a spiral trajectory was written on a Calixarene coated sample (fig. 15).…”

Section: Fabrication Performancementioning

confidence: 99%

“…The constant line width as well as the contour accuracy are due to the closed loop control of the emission current and the nanometer positioning accuracy of the NFM-100. 56 Nanoimprint lithography (NIL) is a high resolution nanofabrication process for fabrication of structures in the sub-10 nm range. 54 Because of the mechanical contact between the stamp and the sample during the molding and demolding process, there are challenging requirements for the position stability and trajectory fidelity.…”

Section: Fabrication Performancementioning

confidence: 99%

“…The pattern was written in a positive tone process which allows immediate inspection in AFM mode of the system without additional developing processes. The constant line width as well as the contour accuracy are due to the closed loop control of the emission current and the nanometer positioning accuracy of the NFM-100 56.…”

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confidence: 99%

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High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

Ortlepp

2024

Novel Patterning Technologies 2024

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For two decades, the Technische Universität Ilmenau has been developing high precision Nanopositioning and Nanomeasuring machines (NPMMs). These have proven their potential for nanometer accurate measurements in large volumes up to 200 mm x 200 mm x 25 mm with 5 axis operation in several fields. As these machines operate according to the highest standards of metrology, offer picometer resolution and nanometer uncertainty, the goal is to transfer their unique precision to fabrication and patterning. So far, the NPMMs have been equipped with laser-based as well as tip-based patterning tools, including one photon and two photon polymerization, nanoimprint, scanning probe lithography and combinations of these technologies. The goal is basic research on these technologies, to tackle the evident challenges and explore the concealed limits to estimate the potential for later use in an industrial scale. In this paper, the specifics and advantages of the NPMMs will be described as well as the micro-and nanofabrication tools that are currently worked on. Focus is on the parameters in measurement mode and the accomplished fabrication results.

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Section: Fabrication Performancementioning

confidence: 99%

Section: Fabrication Performancementioning

confidence: 99%

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High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

Ortlepp

2024

Novel Patterning Technologies 2024

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“…The application of the combined NFM-100 and AFM system in a real scenario is the quality control for arbitrary periodic structures such as scales, diffraction gratings, metamaterials on long ranges, or large area scans through several parallel scan lines, as could be shown for example in [46][47][48][49].…”

Section: Long Range Afm Scans Over 100 MMmentioning

confidence: 99%

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Stauffenberg,

Belkner,

Dontsov

et al. 2024

Meas. Sci. Technol.

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This paper explores large area application of tip-based nanofabrication by field emission scanning probe lithography and showcases the simultaneous possibility of atomic force microscopy on macroscopic scales. This is made possible by the combination of tip-based technology and a planar nanopositioning and nanomeasuring machine. Using long range atomic force microscopy measurement of regular grating structures, the performance of the machine is thoroughly characterized over the full 100 mm range of motion of the positioning machine, which was confirmed by repeated measurements. After initially focussing on achieving the minimum line width of < 40 nm in microscopic areas, a grating with a pitch of 1 μm is additionally fabricated over a total length of 10 mm, whereby the dimensions and deviations are also considered.

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A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication

Wang,

Zhou,

Deng

et al. 2023

Manufacturing Letters

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Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)

Cited by 4 publications

References 0 publications

High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

High-precision nanopositioning and nanomeasuring machines for alternative nanofabrication

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication

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