Nanofabrication: Conventional and nonconventional methods

Chen, Yong; Pépin, A.

doi:10.1002/1522-2683(200101)22:2<187::aid-elps187>3.0.co;2-0

Cited by 290 publications

(193 citation statements)

References 193 publications

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“…[26][27][28][29] In this study, we demonstrate the applicability of colloidal lithography for the nanopatterning of rough and curved surfaces of medical implants by semispherical protrusions. The chosen size of the semispherical nano-protrusions was in the range of 60-220 nm and all the groups were coated with Ti in order to unify the experimental conditions and to distinguish topographic surface cues from chemical ones.…”

mentioning

confidence: 99%

Nanostructured model implants for in vivo studies: influence of well-defined nanotopography on de novo bone formation on titanium implants

Ballo

Agheli²,

Lausmaa³

et al. 2011

IJN

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An implantable model system was developed to investigate the effects of nanoscale surface properties on the osseointegration of titanium implants in rat tibia. Topographical nanostructures with a well-defined shape (semispherical protrusions) and variable size (60 nm, 120 nm and 220 nm) were produced by colloidal lithography on the machined implants. Furthermore, the implants were sputter-coated with titanium to ensure a uniform surface chemical composition. The histological evaluation of bone around the implants at 7 days and 28 days after implantation was performed on the ground sections using optical and scanning electron microscopy. Differences between groups were found mainly in the new bone formation process in the endosteal and marrow bone compartments after 28 days of implantation. Implant surfaces with 60 nm features demonstrated significantly higher bone-implant contact (BIC, 76%) compared with the 120 nm (45%) and control (57%) surfaces. This effect was correlated to the higher density and curvature of the 60 nm protrusions. Within the developed model system, nanoscale protrusions could be applied and systematically varied in size in the presence of microscale background roughness on complex screw-shaped implants. Moreover, the model can be adapted for the systematic variation of surface nanofeature density and chemistry, which opens up new possibilities for in vivo studies of various nanoscale surface-bone interactions.

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mentioning

confidence: 99%

Nanostructured model implants for in vivo studies: influence of well-defined nanotopography on de novo bone formation on titanium implants

Ballo

Agheli²,

Lausmaa³

et al. 2011

IJN

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“…En trabajos previos se comparan los métodos convencionales frente a la siguiente generación litográfica -NGL, por ejemplo en (Chen and P´epin, 2001) (Tseng and Notargiacomo, 2005). En esta sección se describen varios métodos de fabricación a nanoescala y se categorizan las tecnologías de fabricación de acuerdo con sus mecanismos de componentes básicos, ya que éstos direccionan el uso de la energía.…”

Section: Tecnologías De Fabricación a Nanoescalaunclassified

Requerimientos de Energía en los Procesos de Fabricación a Nanoescala

Ferreira

2010

Lámpsakos

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Keywords:Nanoscale, demand for energy, manufacturing technologies.Resumen -En este artículo se describen las principales tecnologías de fabricación a nanoescala, y se examinan cualitativamente los requerimientos, que tienen con respecto a la demanda de energía, sus procesos fundamentales. Estos requerimientos se relacionan con los procesos aplicados en la fabricación de semiconductores; también se describen las falencias en la comprensión de estos procesos para la producción a nanoescala, cuya comunidad investigadora los identifica como objetivos a corto plazo. Por último, se propone un marco para el análisis sistemático del uso de energía en los procesos de fabricación a nanoescala.Palabras clave: Nanoescala, demanda de energía, tecnologías de fabricación.

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“…Traditionally, electron beam lithography 16 , focused ion beam lithography 17 , and nanoimprint lithography 10,18 have mostly been used to create nanometer-sized structures in nanofluidic devices in the past. For the fabrication of the nanochannels, these conventional approaches have definite advantages with respect to a high level of controllability, resolution, and reproducibility.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

Lin

Zhan

et al. 2017

Microsyst Nanoeng

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In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to 'scratch' nanoscale channels on polymethylmethacrylate (PMMA) substrates with sufficiently high hardness. Next, polydimethylsiloxane (PDMS) is used twice to duplicate the nanochannels onto PDMS substrates from the 'nano-scratched' PMMA substrates. A number of experiments are conducted to explore the relationships between the nano-indentation parameters and the nanochannel dimensions and to control the aspect ratio of the fabricated nanochannels. In addition, traditional photolithography combined with soft lithography is employed to fabricate microchannels on another PDMS 'cap' substrate. After manually aligning the substrates, all uncovered channels on two separate PDMS substrates are bonded to achieve a sealed and transparent nanofluidic device, which makes the dimensional transition from microscale to nanoscale feasible. The smallest dimensions of the achievable nanochannels that we have demonstrated thus far are of~20 nm depth and~800 nm width, with lengths extendable beyond 100 μm. Fluid flow experiments are performed to verify the reliability of the device. Two types of colloidal solution are used to visualize the fluid flow through the nanochannels, that is, ethanol is mixed with gold colloid or fluorescent dye (fluorescein isothiocyanate), and the flow rate and filling time of liquid in the nanochannels are estimated based on time-lapsed image data. The simplicity of the fabrication process, bio-compatibility of the polymer substrates, and optical transparency of the nanochannels for flow visualization are key characteristics of this approach that will be very useful for nanofluidic and biomolecular research applications in the future. INTRODUCTIONThe field of nanofluidics is widely known as the research and application of the behaviors of liquid flow in a specific area that is confined to the nanoscale 1 . A significant research interest has risen in this field due to the unique nanofluidic phenomena and flow properties that are markedly different from those in the welldeveloped microfluidics field. For example, since the dimensions of typical nanochannels are comparable to those of biomolecules, such as proteins and DNAs, they may be used for the transportation of selective molecules and DNA stretching. Furthermore, similar to microchannels, the surface-to-volume ratio of nanochannel structures is ultra-high, which leads to a diffusionlimited reaction 2 and negative water pressure induced by capillarity 3 . Moreover, because the size of the electrical double layer formed by strong electrostatic interactions between ions and the charged surface is in the range of 1 − 100 nm (Refs. 4,5), nanoflows in nanochannels will have flow properties that significantly deviate from Newtonian fluids. Based on these novel dimensional effects, many significant applications have been explored over the past ...

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Nanofabrication: Conventional and nonconventional methods

Cited by 290 publications

References 193 publications

Nanostructured model implants for in vivo studies: influence of well-defined nanotopography on de novo bone formation on titanium implants

Nanostructured model implants for in vivo studies: influence of well-defined nanotopography on de novo bone formation on titanium implants

Requerimientos de Energía en los Procesos de Fabricación a Nanoescala

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

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