Nanofabrication

Harvey, E. Newton; Ghantasala, Muralidhar K.

doi:10.1533/9781845691189.303

Cited by 9 publications

(2 citation statements)

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“…In a vector scan, the image is split into vectors, which contain the features and, instead of scanning the entire wafer, the electron beam moves from feature to feature [ 13 ]. The photomasks consist of a chrome layer deposited on a quartz substrate where the chrome layer is etched to create the pattern, which will be transferred to the photoresist, whilst the quartz substrate allows the electron transmission [ 127 ].…”

Section: Conventional Lithographic Techniquesmentioning

confidence: 99%

Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications

Stokes,

Clark,

Odetade

et al. 2023

Discover Nano

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Nano-fabrication techniques have demonstrated their vital importance in technological innovation. However, low-throughput, high-cost and intrinsic resolution limits pose significant restrictions, it is, therefore, paramount to continue improving existing methods as well as developing new techniques to overcome these challenges. This is particularly applicable within the area of biomedical research, which focuses on sensing, increasingly at the point-of-care, as a way to improve patient outcomes. Within this context, this review focuses on the latest advances in the main emerging patterning methods including the two-photon, stereo, electrohydrodynamic, near-field electrospinning-assisted, magneto, magnetorheological drawing, nanoimprint, capillary force, nanosphere, edge, nano transfer printing and block copolymer lithographic technologies for micro- and nanofabrication. Emerging methods enabling structural and chemical nano fabrication are categorised along with prospective chemical and physical patterning techniques. Established lithographic techniques are briefly outlined and the novel lithographic technologies are compared to these, summarising the specific advantages and shortfalls alongside the current lateral resolution limits and the amenability to mass production, evaluated in terms of process scalability and cost. Particular attention is drawn to the potential breakthrough application areas, predominantly within biomedical studies, laying the platform for the tangible paths towards the adoption of alternative developing lithographic technologies or their combination with the established patterning techniques, which depends on the needs of the end-user including, for instance, tolerance of inherent limits, fidelity and reproducibility.

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Section: Conventional Lithographic Techniquesmentioning

confidence: 99%

Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications

Stokes,

Clark,

Odetade

et al. 2023

Discover Nano

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“…On the topic of fabrications, several innovative routes have been developed to meet the requirement to prepare the optical metamaterials [5][6][7]: ultraviolet (UV) or electron beam lithography (EBL) [8,9], focused ion beam (FIB) milling [10], deposition-induced structuring [11], dewetting-induced nanoscale self-formation [12], oblique angle deposition of three-dimensional structures [13], template-assisted etching and deposition [14], and laser direct writing, are examples of these methods [15]. Among them, several advanced nanoscale fabrication techniques such as UV or EBL, and FIB, are either costly or present a low throughput, so that alternative "lithography-free" fabrication approaches are desired to provide, at a larger scale, nanomaterials with a tailored optical response suitable for applications [16].…”

Section: Introductionmentioning

confidence: 99%

Lithography-Free Bismuth Metamaterials for Advanced Light Manipulation

Luan

Tian

2023

Photonics

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Bismuth shows outstanding optical properties, including a metal-like response in the ultraviolet-visible range and a dielectric character with a giant refractive index in the infrared range. In recent years, such unique properties have been employed to construct bismuth-based metamaterials with remarkable optical responses in these spectral regions, especially with cost-effective lithography-free methods. Such responses can be manipulated, both in an astatic way by suitable metamaterial design and in a dynamic way by harnessing the solid–liquid transition of bismuth. In this paper, we review the advances in this field and highlight the applications of such metamaterials to information technology production, energy harvesting and sensing.

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