Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements

Ghouila-Houri, Cécile; Sindjui, Ralph; Moutaouekkil, Mohammed; Elmazria, Omar; Gallas, Quentin; Garnier, Éric; Merlen, Alain; Viard, R.; Talbi, Abdelkrim; Pernod, Philippe

doi:10.3390/proceedings1040377

Cited by 3 publications

(6 citation statements)

References 8 publications

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“…Table 1 gives their structural parameters. In the case of U 0 = 3.346 V, α = −9.6 × 10 −3 V K −1 , δ = 0.77 for TYPE_1; U 0 = 3.965 V, α = −7.4 × 10 −3 V K −1 , δ = 0.77 for TYPE_2, figure 6 shows their simulated relative response voltages and transfer functions under the CC of 10 µA by Matlab software using equations ( 5) and (10). The relative Obviously, TYPE_1 has a smaller lower limit of measurable vacuum (p l1 < p l2 ), and TYPE_2 has a higher upper limit of measurable vacuum (p h1 < p h2 ).…”

Section: Design and Analysismentioning

confidence: 99%

“…First, reducing the distance between sensitive region and heat sink to enhance the molecular regime. Ghouila-Houri et al fabricated a sensor, which works in the pressure range of 10 4 -8 × 10 5 Pa, by forming a 200 nm distance between sensitive region and heat sink [10]. Sun et al mounted a cap with a 50 µm gap on the sensor by glass frit bonding, and the integrated sensor had a response to the pressure from 5 × 10 −3 to 10 5 Pa [11].…”

Section: Introductionmentioning

confidence: 99%

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A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive region and distances between sensitive region and heat sink, and their responses to the pressure are from 3.0 × 10−3 to 3 × 104 Pa and from 1.7 × 10−2 to 4.4 × 105 Pa, respectively. By series-connecting them, the combined sensor achieves a pressure range of 1.3 × 10−3 to 6.9 × 105 Pa without any additional control circuit. In addition, it possesses a relatively small size of 400 × 300 μm2. These indicate that the combined MEMS thermal vacuum sensor has the characteristics of wide pressure range, high sensitivity and small size.

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Section: Design and Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A combined MEMS thermal vacuum sensor with a wide pressure range

Yuan,

Fu,

et al. 2023

J. Micromech. Microeng.

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“…Configuration Sensitivity Footprint Puers et al [3] Quarter-bridge 600 μV/dec 30×3 μm Ghouila-Houri et al [4] Resistive 36 %/dec 1000×4 μm Santagata et al [5] Resistive 17 mV/Pa − 1 4×400 μm Piotto et al [7] Resistive 200 mV/Pa − 1 200×100 μm THIS WORK Resistive 2.5 %/dec 2×5 μm…”

Section: Workmentioning

confidence: 99%

“…org/NANO/32/335501/mmedia) and historically, Pirani pressure sensors mostly operate at low pressure conditions. However, tuning the gap size below~300 nm allows operation at ambient pressure [3,4], enabling a wider range of applications such as barometers for altitude measurements.…”

Section: Introductionmentioning

confidence: 99%

“…According to equation (1), the factorδ is inversely proportional to the suspended strip dimensions. Typical state-of-the-art Pirani implementations have bridge dimensions of 100 μm×200 μm or larger, are thicker than several hundreds of nm and have a power consumption of ∼1 mW or more [4,[7][8][9][10][11][12]. Graphene, a single layer sheet of sp 2 bonded carbon atoms, was first isolated in 2004 by Geim and Novoselov using scotch-tape exfoliation from a graphite crystal [13,14].…”

Section: Introductionmentioning

confidence: 99%

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Multi-layer graphene pirani pressure sensors

et al. 2021

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The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are required, but also minimization of the suspended strip dimensions is essential to maximize the responsivity and minimize the power consumption. Due to this, nanomaterials are especially attractive for this application. Here, we demonstrate the use of a multi-layer suspended graphene strip as a Pirani pressure sensor and compare its behavior with existing models. A clear pressure dependence of the strip's electrical resistance is observed, with a maximum relative change of 2.75% between 1 and 1000 mbar and a power consumption of 8.5 mW. The use of graphene enables miniaturization of the device footprint by 100 times compared to state-of-the-art. Moreover, miniaturization allows for lower power consumption and/or higher responsivity and the sensor's nanogap enables operation near atmospheric pressure that can be used in applications such as barometers for altitude measurement. Furthermore, we demonstrate that the sensor response depends on the type of gas molecules, which opens up the way to selective gas sensing applications. Finally, the graphene synthesis technology is compatible with wafer-scale fabrication, potentially enabling future chiplevel integration with readout electronics.

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Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

Toto

Nicolay

Morini

et al. 2019

Sensors

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Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established.

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Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements

Cited by 3 publications

References 8 publications

A combined MEMS thermal vacuum sensor with a wide pressure range

A combined MEMS thermal vacuum sensor with a wide pressure range

Multi-layer graphene pirani pressure sensors

Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

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