Nanogratings fabricated by wet etching assisted femtosecond laser modification of silicon for surface plasmon resonance sensing

Wu, Meng-Ru; Xu, Na; Wang, Erxi; Gen, Shannan; Zhu, Huaxin; Liu, Cheng; Cao, Jianjun

doi:10.1016/j.apsusc.2022.154446

Cited by 13 publications

(4 citation statements)

References 45 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Methods to fabricate nanogratings have been widely developed in recent years. Techniques such as laser interference lithography, 30 , 31 electron beam lithography, 32 nanoimprinting, 33 – 35 focused ion beam, 36 femtosecond laser modification, 37 direct laser writing, 38 and optical disc-based methods 39 , 40 have been extensively studied. Among these methods, tearing aluminum gratings from DVD discs is one of the most convenient and cost-effective approaches to fabricating large-scale and high-uniform metal gratings.…”

Section: Implementationsmentioning

confidence: 99%

Compact surface plasmon resonance sensor using the digital versatile disc grating as a coupler and a disperser

Wang

Cao

et al. 2023

Opt. Eng.

Self Cite

View full text Add to dashboard Cite

Compact surface plasmon resonance (SPR) sensors are highly demanded due to their small size, low cost, and wide application scenarios compared with benchtop sensors. To realize high-precision spectral or angular analysis, most compact SPR sensors need spectrometers or rotation stages, which increase the cost of the device. We demonstrate a low-cost and compact SPR sensor by utilizing a single grating as a coupler and a disperser. The polychromatic light emitted from a light-emitting diode was coupled to surface plasmon modes by a grating made from a digital versatile disc-recordable disc. The light was dispersed by the same grating and collected by a linear charge-coupled device. The real-time detection of the SPR spectra and the resonant wavelengths was realized by homemade software based on the laboratory virtual instrument engineering workbench. By measuring different concentrations of glucose solution and sodium chloride solution, we obtain a high refractive index (RI) resolution of 5.52 × 10 −5 RI unit. This compact SPR sensor can be applied in the areas of food safety, environmental monitoring, medical diagnosis, and so on.

show abstract

Section: Implementationsmentioning

confidence: 99%

Compact surface plasmon resonance sensor using the digital versatile disc grating as a coupler and a disperser

Wang

Cao

et al. 2023

Opt. Eng.

Self Cite

View full text Add to dashboard Cite

show abstract

“…Surface plasmon-polaritons (SPPs) are electromagnetic surface waves that propagate along the boundary between a metal and a dielectric or semiconductor, with the maximum field located at this interface and decaying exponentially in both media [1]. Being a non-radiative mode, such a surface wave requires matching its wave vector with the wave vector of the incident light, which, in most cases, is accomplished using a coupling prism [2][3][4] or diffraction grating [5][6][7]. Under optimal conditions, the complete transformation of light energy into the energy of surface plasmon-polaritons is achieved, accompanied by a local increase in the intensity of the electromagnetic field at the interface with the metal plasmon-carrying film.…”

Section: Introductionmentioning

confidence: 99%

Aluminum-Based Plasmonic Photodetector for Sensing Applications

Lyaschuk,

Indutnyi,

Myn’ko

et al. 2024

Applied Sciences

View full text Add to dashboard Cite

Plasmonic sensors have great potential for widespread usage. However, the prohibitive cost of noble metals restrains the wider adoption of these devices. The aim of our study is to develop a cost-effective Al-based alternative to common noble metal-based plasmonic detectors. We considered a structure consisting of an n-type doped Si wafer with a shallow p-n junction and an overlying Al grating with a trapezoidal groove profile. The RCWA (rigorous coupled-wave analysis) method was used to numerically calculate the distribution of absorbed light energy in the plasmonic detector layers and to optimize the grating parameters. Based on the simulation results, experimental samples of plasmonic photodetectors with optimal grating parameters (period—633 nm, relief depth—50 nm, groove filling factor—0.36, and thickness of the intermediate Al layer—14 nm) were manufactured, and their properties were studied. For these samples, we obtained a polarization sensitivity value of Ip/Is = 8, an FWHM of the resonance in the photocurrent spectrum ranging from 50 to 100 nm, a sensitivity at the resonance maximum of Iph = 0.04–0.06 A/W, and an angular half-width of photocurrent resonance of Δθ = 5°, which are comparable to noble metal-based analogs. Our results may be used for creating cost-effective high-sensitivity plasmonic sensors.

show abstract

“…Plasmonic color printing stands out as an environmentally conscious alternative to traditional dye-based printing, addressing concerns such as photobleaching and chemical reliance. , By harnessing the light-manipulating capabilities of nanostructures, it not only eliminates fading but also enhances image vibrancy and resolution, blending the durability of plasmonic materials with the intricate allure of structural colors. − Various methods have been explored for structural color generation, including dielectric multilayers, , plasmonic diffraction gratings, , metal cross structures mounted on transparent substrates, and hole arrays positioned above a back-reflector. , However, these methods often face limitations such as angle-dependent color perception and low reflectivity.…”

Section: Introductionmentioning

confidence: 99%

Color Generation and Polarization-Sensitive Encryption by Laser Writing on Plasmonic Reflector Arrays

Zhou,

Zhu,

Cao

et al. 2024

ACS Appl. Mater. Interfaces

Self Cite

View full text Add to dashboard Cite

Plasmonic color printing presents a sustainable solution for vibrant and durable color reproduction by leveraging the light-manipulating properties of nanostructures. However, the fabrication of plasmonic nanostructures has posed challenges, hindering widespread adoption. In this paper, we introduce plasmonic reflector arrays (PRAs) composed of three layers�Ag nanoparticles (NPs), an Al 2 O 3 spacer, and an Ag reflector�deposited via physical vapor deposition (PVD). By employing nanosecond and femtosecond laser writing techniques, we manipulate the surface morphology of silver nanoparticles on PRAs, resulting in a diverse range of structural colors that are both polarization-insensitive and polarization-sensitive. Furthermore, we demonstrate the versatility of nanosecond laser writing in creating intricate patterns on PRAs. Additionally, we propose a novel two-step method combining nanosecond and femtosecond laser processing to embed QR code patterns into PRAs, showcasing their potential for secure data encryption and transmission. This research underscores the promising applications of PRAs in advanced color printing and secure optical data encoding.

show abstract

Nanogratings fabricated by wet etching assisted femtosecond laser modification of silicon for surface plasmon resonance sensing

Cited by 13 publications

References 45 publications

Compact surface plasmon resonance sensor using the digital versatile disc grating as a coupler and a disperser

Compact surface plasmon resonance sensor using the digital versatile disc grating as a coupler and a disperser

Aluminum-Based Plasmonic Photodetector for Sensing Applications

Color Generation and Polarization-Sensitive Encryption by Laser Writing on Plasmonic Reflector Arrays

Contact Info

Product

Resources

About