2011
DOI: 10.3390/ma4050929
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Nanohardness and Residual Stress in TiN Coatings

Abstract: TiN films were prepared by the Cathodic arc evaporation deposition method under different negative substrate bias. AFM image analyses show that the growth mode of biased coatings changes from 3D island to lateral when the negative bias potential is increased. Nanohardness of the thin films was measured by nanoindentation, and residual stress was determined using Grazing incidence X ray diffraction. The maximum value of residual stress is reached at −100 V substrate bias coinciding with the biggest values of ad… Show more

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Cited by 38 publications
(14 citation statements)
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“…The initial layer, which is generally a compositional variant of the substrate, is designed to achieve good chemical bonding while subsequent layers modulate a transition in elastic properties. These layers reduce deposition and thermally induced compressive residual stresses, which can be significant-up to 11 GPa [221]. Delamination of the coating would readily occur in their absence [222].…”
Section: Grain Size and Morphologymentioning
confidence: 98%
“…The initial layer, which is generally a compositional variant of the substrate, is designed to achieve good chemical bonding while subsequent layers modulate a transition in elastic properties. These layers reduce deposition and thermally induced compressive residual stresses, which can be significant-up to 11 GPa [221]. Delamination of the coating would readily occur in their absence [222].…”
Section: Grain Size and Morphologymentioning
confidence: 98%
“…They are characteristic for titanium nitride and oxide. 9,11) In the near-surface area of the NiTi matrix, where the parent phase has been identified, the Young's modulus value varied from about 30 GPa to about 50 GPa. These values are about 2 times higher than measured for the area containing the Rphase.…”
Section: Resultsmentioning
confidence: 99%
“…The principle of the calotest method (based on[6]); Dthe diameter of the ball used in the test, X and Y -diameters of the obtained scar, T -coating thickness.…”
mentioning
confidence: 99%