2003
DOI: 10.1016/s0168-583x(03)00616-5
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Nanohillock formation by impact of small low-energy clusters with surfaces

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Cited by 23 publications
(15 citation statements)
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“…19 The source was attached to a cluster implantation and deposition apparatus ͑CIDA͒. 20,21 This combination provides the possibility to produce metal clusters and manipulate the cluster beam, in particular, to separate the cationic clusters from neutral and anionic ones, control their size and kinetic energy ͑velocity͒ and carry out deposition and implantation experiments under ultrahighvacuum ͑UHV͒ conditions. 19,22 A time-of-flight mass spectrometer in the Wiley-McLaren configuration together with a multichannel plate detector is used to obtain the mass spectra of cluster ions.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…19 The source was attached to a cluster implantation and deposition apparatus ͑CIDA͒. 20,21 This combination provides the possibility to produce metal clusters and manipulate the cluster beam, in particular, to separate the cationic clusters from neutral and anionic ones, control their size and kinetic energy ͑velocity͒ and carry out deposition and implantation experiments under ultrahighvacuum ͑UHV͒ conditions. 19,22 A time-of-flight mass spectrometer in the Wiley-McLaren configuration together with a multichannel plate detector is used to obtain the mass spectra of cluster ions.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Hillocks are often found on impact of keV-energy clusters, a few orders of magnitude lower in energy compared to the cases of ion implantation, discussed above [275,309,310,311,312]. In most cases, the hillocks were reported to be cone-shaped (or truncated coneshaped).…”
Section: Crater and Hillock Formationmentioning
confidence: 99%
“…In some reports [310,312], larger diameters were measured using AFM but they were most probably related to the tip convolution effect. Thus, the hillock dimensions on cluster ion impact are very similar to those reported for high-energy ion implantation.…”
Section: Crater and Hillock Formationmentioning
confidence: 99%
“…out in vacuum allows avoiding contamination. Moreover, the cluster beam technique gives a possibility to control the kinetic energy of the particles thus providing conditions for pinning of clusters or nanostructuring of surfaces [8,9], in other words widening the spectrum of possible applications.…”
Section: Introductionmentioning
confidence: 99%