Lithography 2010
DOI: 10.5772/8189
|View full text |Cite
|
Sign up to set email alerts
|

Nanoimprint Lithography

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
38
0

Year Published

2013
2013
2022
2022

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 41 publications
(38 citation statements)
references
References 34 publications
0
38
0
Order By: Relevance
“…The advantage of NIL is its ability to create high-throughput nanopatterns on flexible polymer films and nonplanar surfaces. [81] Another way to produce well-defined structured polymeric surfaces is by means of inkjet printing, a technique in which the polymer surface is selectively etched by droplets of a solvent or a reactive ink. Polymer patterning can also be realized by deposition of the polymer droplet solution, which creates a pattern once the solvent evaporates.…”
Section: Amorphous Polymersmentioning
confidence: 99%
“…The advantage of NIL is its ability to create high-throughput nanopatterns on flexible polymer films and nonplanar surfaces. [81] Another way to produce well-defined structured polymeric surfaces is by means of inkjet printing, a technique in which the polymer surface is selectively etched by droplets of a solvent or a reactive ink. Polymer patterning can also be realized by deposition of the polymer droplet solution, which creates a pattern once the solvent evaporates.…”
Section: Amorphous Polymersmentioning
confidence: 99%
“…In general, P2P NIL may be conducted in two manners: single-step imprinting and multiple-step imprinting [11]. In single-step imprinting, the entire imprint area (usually the entire wafer) is imprinted in a single imprinting cycle regardless of its size.…”
Section: Reviewmentioning
confidence: 99%
“…1. In addition, it is worth noting that this metallic structure can readily be fabricated via the conventional e-beam [37,38] or focused ion beam (FIB) technology [39]. First of all, a simple conventional CMNS structure having no trench structure is analyzed by utilizing the numerical model based on a full-vectorial finite element method (FEM: COMSOL Multiphysics ® ).…”
Section: Numerical Modelling Of a Circular Metal Nano-slit Structurementioning
confidence: 99%