Nanoimprint of gratings on a bulk metallic glass

Chu, Jinn P.; Wijaya, H.; Wu, Chia‐Hua; Tsai, Tsong-Ru; Wei, C. M.; Nieh, T.G.; Wadsworth, J.

doi:10.1063/1.2431710

Cited by 113 publications

(73 citation statements)

References 9 publications

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“…Taking advantage of BMGs' superplastic flow in the supercooled liquid region (SCLR), thermoplastic forming (TPF) has been widely employed to fabricate precise and versatile geometries on length scales ranging from 10 nm to several centimeters [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36]. The formability has been proposed to be the key property that determines the suitability of BMGs for TPF [37][38][39][40][41][42].…”

Section: Introductionmentioning

confidence: 99%

A thermoplastic forming map of a Zr-based bulk metallic glass

Chen

Jiang

et al. 2013

Acta Materialia

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A thermoplastic forming (TPF) map of a Zr 35 Ti 30 Be 26.75 Cu 8.25 bulk metallic glass was constructed through systematic hot-embossing experiments, spanning a wide range of strain rates and temperatures in the supercooled liquid region. By comparison with the corresponding deformation map, it is found that Newtonian flow, non-Newtonian flow and inhomogeneous flow regions correspond well to fully filled, partially filled and non-filled regions, respectively, in the hot-embossing TPF map. Furthermore, the spatio-temporally homogeneous flow facilitates the thermoplastic formabillity of the Zr-based bulk metallic glass, which is rationalized in terms of free volume theory as well as by finite element simulations. Finally, our results are corroborated by potential application tests.

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Section: Introductionmentioning

confidence: 99%

A thermoplastic forming map of a Zr-based bulk metallic glass

Chen

Jiang

et al. 2013

Acta Materialia

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“…Titania films were replicated precisely from natural cellulosic fibers with a variable tube outer diameter (30 nm-100 nm) and a uniform tube thickness (10 nm) [99]. Bulk metallic glasses (BMGs) were proposed to be used for replication to produce components of nano/microdevices [34,122]. Various pattern sizes from $2 mm to 100 mm were transferred from original Si dies.…”

Section: Nanoreplicationmentioning

confidence: 99%

Nanomanufacturing—Perspective and applications

et al. 2017

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“…BMGs possess attractive properties relative to crystalline alloys, including strength and elasticity, which are often paired with high corrosion resistance 1,2 . BMGs have been advanced as a means to achieve metallic surfaces with multiscale textures due to their ability to be thermoplastically formed on various length scales by compression 3,4 or blow molding 5 . In particular, the ability to thermoplastically form BMGs on the nanoscale 6 has yielded surfaces possessing superior properties, such as high surface area, that are useful for a multitude of applications, including durable electrochemical surfaces 7,8 , fuel cells 9 , controlled wetting surfaces 10 , and cellular response-manipulating patterns 11 .…”

Section: Introductionmentioning

confidence: 99%

Multiscale patterning of a metallic glass using sacrificial imprint lithography

et al. 2015

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Bulk metallic glasses (BMGs) have been developed as a means to achieve durable multiscale, nanotextured surfaces with desirable properties dictated by topography for a multitude of applications. One barrier to this achievement is the lack of a bridging technique between macroscale thermoplastic forming and nanoimprint lithography, which arises from the difficulty and cost of generating controlled nanostructures on complex geometries using conventional top-down approaches. This difficulty is compounded by the necessary destruction of any resulting reentrant structures during rigid demolding. We have developed a generalized method to overcome this limitation by sacrificial template imprinting using zinc oxide (ZnO) nanostructures. It is established that such structures can be grown inexpensively and quickly with tunable morphologies on a wide variety of substrates out of solution, which we exploit to generate the nanoscale portion of the multiscale pattern through this bottom-up approach. In this way, we achieve metallic structures that simultaneously demonstrate features from the macroscale down to the nanoscale, requiring only the top-down fabrication of macro/microstructured molds. Upon detachment of the formed part from the multiscale molds, the ZnO remains embedded in the surface and can be removed by etching in mild conditions to both regenerate the mold and render the surface of the BMGs nanoporous. The ability to pattern metallic surfaces in a single step on length scales from centimeters down to nanometers is a critical step toward fabricating devices with complex shapes that rely on multiscale topography for their intended functions, such as biomedical and electrochemical applications.

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Nanoimprint of gratings on a bulk metallic glass

Cited by 113 publications

References 9 publications

A thermoplastic forming map of a Zr-based bulk metallic glass

A thermoplastic forming map of a Zr-based bulk metallic glass

Nanomanufacturing—Perspective and applications

Multiscale patterning of a metallic glass using sacrificial imprint lithography

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