2004
DOI: 10.1115/1.1704625
|View full text |Cite
|
Sign up to set email alerts
|

Nanoindentation. Mechanical Engineering Series

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

1
42
0

Year Published

2015
2015
2024
2024

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 112 publications
(43 citation statements)
references
References 0 publications
1
42
0
Order By: Relevance
“…Finally, the different values of hardness and indentation modulus revealed by micro‐ and nanoindentation test for the same materials reflect the well‐known issue related to indentation size effect. Indeed, it is generally accepted that the indentation hardness measured even with geometrically self‐similar pyramidal indenter (i.e., the commonly used Berkovich indenter) increases with decreasing indentation depth or force …”
Section: Resultsmentioning
confidence: 99%
“…Finally, the different values of hardness and indentation modulus revealed by micro‐ and nanoindentation test for the same materials reflect the well‐known issue related to indentation size effect. Indeed, it is generally accepted that the indentation hardness measured even with geometrically self‐similar pyramidal indenter (i.e., the commonly used Berkovich indenter) increases with decreasing indentation depth or force …”
Section: Resultsmentioning
confidence: 99%
“…Since there is no theory applicable to the determination of mechanical properties of such micro- to nano-meter thick films, presently, the analytical method used in this paper is just an approach to approximately estimate the true film hardness and modulus in the direction perpendicular to the indentation surface, in which the main purpose is to use these mechanical parameters as references to check multilayer design variables and compare different film-forming conditions. The hardness defined by the applied load divided by the corresponding projected area is the mean contact pressure and is found to be proportional to the film’s yield or flow stress in compression for isotropic materials [34]. The hardness of multilayers has a similar physical meaning if the same concept is assumed valid.…”
Section: Discussionmentioning
confidence: 99%
“…It can also be used for thin films on substrate, provided that the maximum indentation depth is less than 10% of the film thickness to avoid the stiffness contribution of the substrate to the indenter-sample contact [15]. Much effort has been devoted to finding methods of deriving the film modulus and hardness from the measured composite response of tip-film-substrate system, e.g., introduction of the exponential weighting factors to divide contributions of the film and substrate to the composite modulus by Doerner et al, King et al and Saha et al [28,29,30]; a closed-form solution based on moduli-perturbation method by Gao [31]; an extrapolating method of the best-fit curve of experimental data by Mencik et al [32] and Fisher-Cripps [33,34]; the deconvolution of film properties method modified from Hu’s solution [35] by Jung et al [36]. In this paper, the method proposed by Korsunsky et al [37] and Tuck et al [38] based on an energy-based analysis of indentation testing is used to extract the film hardness H f by: Hc=Hs+HfHs1+[(h/t)/β0]X…”
Section: Methodsmentioning
confidence: 99%
“…The second hold step (v) was also included at the end of the unloading from maximum load. Additionally, we put in our experiment the total time from the start of the test to the beginning of the unloading to be of 25 s, which is in the range of the time calculated for the PE film, using an equation proposed by Feng and Ngan . They found that if the total time from the start of the test to the beginning of the unloading ( t h ) has values in the range of the calculated by eq.…”
Section: Methodsmentioning
confidence: 95%
“…To correct for thermal drift, the nano‐indentation instruments allow for a hold series of data points to be accumulated at either maximum load or at the end of the unloading from maximum load . The first is creep within the specimen material as a result of plastic flow, which manifests itself when the load is held constant, and the depth readings increase as the indenter sinks into the specimen.…”
Section: Methodsmentioning
confidence: 99%