Nanoindentation of amorphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates

Чеченин, Н.Г.; Bøttiger, J.; Krog, J.P.

doi:10.1016/s0040-6090(94)06494-6

Cited by 48 publications

(23 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This observation is confirmed by the fact that the indenter penetration related to the pop-in event (1250 nm visible on Fig. 3a) equals to 10% of the film thickness (12.5 mm), 50 µm 500 nm which corresponds to the interaction of the plastic zone with the substrate as it was already observed by Chechenin et al [32]. On the other hand, it is noticeable that such pop-in events are not apparently observed in microindentation when using higher loads and classical loading rate conditions (Fig.…”

Section: Indentation Experimentssupporting

confidence: 85%

“…This abrupt change during loading can be connected to two phenomena: (1) the transition regime from elastic to elasto-plastic deformation of the material [31] or (2) the fracture of the oxide film due to the indentation stress intensity and the brittleness of the film [32][33][34]. In case 1, Hertz's theory represented by the power law: L¼ Kh 3/2 , where K is a parameter related to the elastic modulus, must be verified before the pop-in event.…”

Section: Indentation Experimentsmentioning

confidence: 99%

See 1 more Smart Citation

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Hemmouche¹,

Chicot²,

Amrouche³

et al. 2013

Materials Science and Engineering: A

View full text Add to dashboard Cite

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tThe elastic modulus of thin films can be directly determined by instrumented indentation when the indenter penetration does not exceed a fraction of the film thickness, depending on the mechanical properties of both film and substrate. When it is not possible, application of models for separating the contribution of the substrate is necessary. In this work, the robustness of several models is analyzed in the case of the elastic modulus determination of a porous aluminium oxide film produced by anodization of an aluminium alloy. Instrumented indentation tests employing a Berkovich indenter were performed at a nanometric scale, which allowed a direct determination of the film elastic modulus, whose value was found to be approximately 11 GPa. However, at a micrometric scale the elastic modulus tends toward the value corresponding to the substrate, of approximately 73 GPa. The objective of the present work is to apply different models for testing their consistency over the complete set of indentation data obtained from both classical tests in microindentation and the continuous stiffness measurement mode in nanoindentation. This approach shows the continuity between the two scales of measurement thus allowing a better representation of the elastic modulus variation between two limits corresponding to the substrate and film elastic moduli. Gao's function proved to be the best to represent the elastic modulus variation.

show abstract

Section: Indentation Experimentssupporting

confidence: 85%

Section: Indentation Experimentsmentioning

confidence: 99%

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Hemmouche¹,

Chicot²,

Amrouche³

et al. 2013

Materials Science and Engineering: A

View full text Add to dashboard Cite

show abstract

“…[8] pointed out that the CZ model failed to predict the composite hardness for a hard fihn on a soft substrate by underestimating the contribution of the substrate. The reason for this is owing to the fixed conical shape of the plastic zones, which does not depend on the relation between the elastic-plastic properties of the film and the substrate.…”

Section: Analysis Of Film Hardnessmentioning

confidence: 99%

Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus

2004

View full text Add to dashboard Cite

ABSTRACT:In the present paper, the hardness and Young's modulus of film-substrate systems are determined by means of nanoindentation experiments and modified models. Aluminum film and two kinds of substrates, i.e. glass and silicon, are studied. Nanoindentation XP II and continuous stiffness mode are used during the experiments. In order to avoid the influence of the Oliver and Pharr method used in the experiments, the experiment data are analyzed with the constant Young's modulus assmnption and the equal hardness assumption. The volume fraction model (CZ model) proposed by Fabes et al. (1992) is used and modified to analyze the measured hardness. The method proposed by Doerner and Nix (DN formula) (1986) is modified to analyze the measured Young's modulus. Two kinds of modified empirical formula are used to predict the present experiment results and those in the literature, which include the results of two kinds of systems, i.e., a soft film on a hard substrate and a hard film on a soft substrate. In the modified CZ model, the indentation influence angle, ~, is considered as a relevant physical parameter, which embodies the effects of the indenter tip radius, pile-up or sink-in phenomena and deformation of film and substrate.

show abstract

“…9.4e) is about 1.22-0.39 for the in situ case, and 0.74-0.27 for the ex situ case. In addition, for both ex situ and in situ conditions the measured hardness increases from the value for pure Al (*0.6 GPa) [11] toward that for pure porous alumina (*8 GPa) [1] as the anodization time increases. This implies the increasing contribution of the porous alumina layer to the measured hardness as the oxide thickens during anodization.…”

Section: Softening During In Situ Nanoindentationmentioning

confidence: 89%

“…The Pilling-Bedworth ratio [25,26] which means 19 % volume increase. This implies that large stresses may be created during in situ indentation at the m/o interface [26], which may facilitate the deformation of the oxide barrier layer as well as the Al substrate just below the barrier layer, since the hardness of Al metal is more than 10 times smaller than that of the anodic alumina oxide [1,11]. Moreover, as the electric current passes through the Al substrate, dislocation activities within it may be enhanced, resulting in softening compared with the situation without current passing.…”

Section: Enhancement Of Dislocation Activities In Aluminum Substratementioning

confidence: 99%

Chemomechanical Softening During In Situ Nanoindentation of Anodic Porous Alumina with Anodization Processing

Cheng¹

2015

Electro-Chemo-Mechanics of Anodic Porous Alumina Nano-Honeycombs: Self-Ordered Growth and Actuation

View full text Add to dashboard Cite

Nanoindentation of amorphous aluminum oxide films II. Critical parameters for the breakthrough and a membrane effect in thin hard films on soft substrates

Cited by 48 publications

References 11 publications

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

An analysis of the elastic properties of a porous aluminium oxide film by means of indentation techniques

Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus

Chemomechanical Softening During In Situ Nanoindentation of Anodic Porous Alumina with Anodization Processing

Contact Info

Product

Resources

About