Atomic Layer Deposition of Nanostructured Materials 2011
DOI: 10.1002/9783527639915.ch16
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“…Titanium dioxide (TiO 2 ) thin films have been extensively used in optical applications, such as antireflection coatings, waveguides and so on [1][2][3]. Various methods can be used for the fabrication of the TiO 2 thin films such as PECVD [4], sputtering [5] etc.…”
Section: Introductionmentioning
confidence: 99%
“…Titanium dioxide (TiO 2 ) thin films have been extensively used in optical applications, such as antireflection coatings, waveguides and so on [1][2][3]. Various methods can be used for the fabrication of the TiO 2 thin films such as PECVD [4], sputtering [5] etc.…”
Section: Introductionmentioning
confidence: 99%