2016
DOI: 10.1016/j.tsf.2015.11.073
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Nanomechanical characterization of porous anodic aluminum oxide films by nanoindentation

Abstract: Nanostructured thin films have gained great interests in recent years due to their significantly enhanced properties and great potential for various applications. Nanoindentation techniques are commonly used to measure nanomechanical properties of thin films and the surface layers of bulk materials. In this article, nanoindentation tests coupled with computer modeling were proposed to characterize nanostructured porous anodic aluminum oxide (AAO) films grown on glass. A three-dimensional nanoindentation model … Show more

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Cited by 15 publications
(9 citation statements)
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“…Because the CSM method was used, the mechanical properties are reported with respect to the indentation depths. The results show small variations in the modulus and hardness values with respect to depth for the glass substrate with an average value of 77.15 GPa for the elastic modulus and 4.75 GPa for the hardness which largely agree with results from literature (Hu et al 2016). But for the AAO films, the modulus and hardness increase with increasing depth because of the substrate effect.…”
Section: Nanoindentationsupporting
confidence: 89%
See 1 more Smart Citation
“…Because the CSM method was used, the mechanical properties are reported with respect to the indentation depths. The results show small variations in the modulus and hardness values with respect to depth for the glass substrate with an average value of 77.15 GPa for the elastic modulus and 4.75 GPa for the hardness which largely agree with results from literature (Hu et al 2016). But for the AAO films, the modulus and hardness increase with increasing depth because of the substrate effect.…”
Section: Nanoindentationsupporting
confidence: 89%
“…Furthermore, a deeper understanding of the nanoindentation process can be approached by studying the stress and strain distributions in the film and the substrate, which hardly can be analyzed by experimental means. For AAO thin films, Hu et al developed a three-dimensional FE model to study the mechanical characteristics of the films, and to identify the effect of the glass substrate (Hu et al 2016).…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, similar schemes were used by other authors for the estimation of parameters in nanoindentation [21], or by simple trial and error approaches [16], for instance.…”
Section: Discussionmentioning
confidence: 99%
“…With regard to prescribed force vs prescribed displacement approaches, it is worth to mention that when a prescribed displacement approach is implemented in micro or nano-indentation FEM modeling, as generally adopted in the area [7,9,12,15,16,19,24,25,28,[60][61][62], a displacement function is used to simulates the indenter penetration (on the material to characterize) down to a maximum indentation depth and its withdrawn to the initial position. Thus, creep cannot be captured because the indenter is restricted to move when a maximum indentation is reached.…”
Section: Discussionmentioning
confidence: 99%
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