Nanomechanical mass sensing and stiffness spectrometry based on two-dimensional vibrations of resonant nanowires

Gil-Santos, Eduardo; Ramos, Daniel; Martínez, Javier López; Fernández-Regúlez, Marta; García, Ricardo García; Paulo, Álvaro San; Calleja, Montserrat; Tamayo, Javier

doi:10.1038/nnano.2010.151

Cited by 264 publications

(284 citation statements)

References 30 publications

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“…The first three mechanical modes of resonance are detected. Each mode is split in two orthogonal modes corresponding to two preferential resonant directions, which arise from the irregular geometry of the hexagonal cross-section and other structural defects 26 . A quality factor of 3,600 is estimated for the first mode of resonance.…”

Section: Linear Transductionmentioning

confidence: 99%

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

et al. 2014

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Highly sensitive conversion of motion into readable electrical signals is a crucial and challenging issue for nanomechanical resonators. Efficient transduction is particularly difficult to realize in devices of low dimensionality, such as beam resonators based on carbon nanotubes or silicon nanowires, where mechanical vibrations combine very high frequencies with miniscule amplitudes. Here we describe an enhanced piezoresistive transduction mechanism based on the asymmetry of the beam shape at rest. We show that this mechanism enables highly sensitive linear detection of the vibration of low-resistivity silicon beams without the need of exceptionally large piezoresistive coefficients. The general application of this effect is demonstrated by detecting multiple-order modes of silicon nanowire resonators made by either top-down or bottom-up fabrication methods. These results reveal a promising approach for practical applications of the simplest mechanical resonators, facilitating its manufacturability by very large-scale integration technologies.

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Section: Linear Transductionmentioning

confidence: 99%

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

et al. 2014

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“…In this article, we expose a novel ultrasensitive measurement technique going beyond scalar measurements and permitting to directly image vectorial 2D force fields. It is based on a singly clamped nanowire (NW) which can oscillate along two perpendicular transverse directions [18,[20][21][22][23][24]. Its vibrating extremity is immersed in the force field under investigation while its 2D-Brownian motion is optically detected and reconstructed in realtime.…”

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confidence: 99%

A universal and ultrasensitive vectorial nanomechanical sensor for imaging 2D force fields

et al. 2016

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Miniaturization of force probes into nanomechanical oscillators enables ultrasensitive investigations of forces on dimensions smaller than their characteristic length scale. Meanwhile it also unravels the force field vectorial character and how its topology impacts the measurement. Here we expose an ultrasensitive method to image 2D vectorial force fields by optomechanically following the bidimensional Brownian motion of a singly clamped nanowire. This novel approach relies on angular and spectral tomography of its quasi frequency-degenerated transverse mechanical polarizations: immersing the nanoresonator in a vectorial force field does not only shift its eigenfrequencies but also rotate eigenmodes orientation as a nano-compass. This universal method is employed to map a tunable electrostatic force field whose spatial gradients can even take precedence over the intrinsic nanowire properties. Enabling vectorial force fields imaging with demonstrated sensitivities of attonewton variations over the nanoprobe Brownian trajectory will have strong impact on scientific exploration at the nanoscale.Introduction-Nanosciences were revolutionized by the invention of atomic force microscopy [1] which enabled first perceptions of the nanoworld, by measuring proximity forces exerted by a sample on a micromechanical oscillator. The subsequent emergence of nanomechanical oscillators and evolutions in readout techniques [2][3][4] lead to impressive improvements in force sensitivity [5], enabling detection of collective spin dynamics [6][7][8], single electron spin [9], mass sensing of atoms [10,11] or inertial sensing [12]. Attractive perspectives arise too when nanoresonators are hybridized to single quantum systems, such as molecular magnets [13], spin or solid states qubits [14][15][16][17]. This reduction of the probe size naturally motivates the exploration of force fields on dimensions smaller than their characteristic length scale where a great physical richness is expected, in particular for nanoscale imaging or investigations of fundamental interactions such as proximity forces or near field couplings. In this situation, measurements are performed in presence of strong force field gradients whose vectorial structure becomes crucially relevant and should be fully accounted to describe the measurement process itself [18].

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“…For transduction, the proposed Flexure-FET biosensor utilizes the change in suspended gate stiffness from k to k þ Δk, (12,24,(27)(28)(29) due to the capture of biomolecules. The change in stiffness due to the capture of biomolecules has been demonstrated by several recent experiments of mass sensing using nanocantilever-based resonators (12,27,28) (Fig.…”

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Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

Jain

Nair

Alam

2012

Proc. Natl. Acad. Sci. U.S.A.

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In this article, we propose a Flexure-FET (flexure sensitive field effect transistor) ultrasensitive biosensor that utilizes the nonlinear electromechanical coupling to overcome the fundamental sensitivity limits of classical electrical or mechanical nanoscale biosensors. The stiffness of the suspended gate of Flexure-FET changes with the capture of the target biomolecules, and the corresponding change in the gate shape or deflection is reflected in the drain current of FET. The Flexure-FET is configured to operate such that the gate is biased near pull-in instability, and the FET-channel is biased in the subthreshold regime. In this coupled nonlinear operating mode, the sensitivity (S) of Flexure-FET with respect to the captured molecule density (N s ) is shown to be exponentially higher than that of any other electrical or mechanical biosensor.In other words, while S Flexure ∼ e ðγ 1 ffiffiffiffi N s p −γ 2 N s Þ , classical electrical or mechanical biosensors are limited to S classical ∼ γ 3 N S or γ 4 lnðN S Þ, where γ i are sensor-specific constants. In addition, the proposed sensor can detect both charged and charge-neutral biomolecules, without requiring a reference electrode or any sophisticated instrumentation, making it a potential candidate for various low-cost, point-of-care applications.label-free detection | genome sequencing | cantilever | spring-softening | critical-point sensors N anoscale biosensors are widely regarded as a potential candidate for ultrasensitive, label-free detection of biochemical molecules. Among the various technologies, significant research have focused on developing ultrasensitive nanoscale electrical (1) and mechanical (2) biosensors. Despite remarkable progress over the last decade, these technologies have fundamental challenges that limit opportunities for further improvement in their sensitivity ( Fig. 1A) (3-6). For example, the sensitivity of electrical nanobiosensors such as Si-Nanowire (NW) FET (field effect transistor) (Fig. 1B) is severely suppressed by the electrostatic screening due to the presence of other ions/charged biomolecules in the solution (7), which limits its sensitivity to vary linearly (in subthreshold regime) (3, 7) or logarithmically (in accumulation regime) (4,7,8,9) with respect to the captured molecule density N s . Moreover, the miniaturization and stability of the reference electrode have been a persistent problem, especially for lab-onchip applications (1). Finally, it is difficult to detect charge-neutral biological entities such as viruses or proteins using chargebased electrical nanobiosensor schemes.In contrast, nanomechanical biosensors like nanocantilevers (10, 11) (Fig. 1C) do not require biomolecules to be charged for detection. Here, the capture of target molecules on the cantilever surface modulates its mass, stiffness, and/or surface stress (5,11,12). This change in the mechanical properties of the cantilever can then be observed as a change in its resonance frequency (dynamic mode), mechanical deflection, or change in the resist...

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Nanomechanical mass sensing and stiffness spectrometry based on two-dimensional vibrations of resonant nanowires

Cited by 264 publications

References 30 publications

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

A universal and ultrasensitive vectorial nanomechanical sensor for imaging 2D force fields

Flexure-FET biosensor to break the fundamental sensitivity limits of nanobiosensors using nonlinear electromechanical coupling

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