2003
DOI: 10.1023/a:1024424518822
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Nanoparticle Formation Mechanism in CVD Reactor with Ionization of Source Vapor

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Cited by 35 publications
(15 citation statements)
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“…However, at a high deposition pressure (higher than P c ), more collisions take place among the gas molecules, ions, and electrons in the plasma, which thus increase the plasma's radical density and reduce the energy of the carbon ion species. As a result, CNPs form in the dense plasma and grow as the density of the carbon radicals increases (carbon ion species), like other nanoparticles deposited via CVD processes373839. Because the energy was too low for the CNPs to penetrate the growing subsurface, the CNPs simply adhered to the growing top surface and remained in the lowest energy state of sp 2 bonding (graphite-like bonding)32, forming a porous network as nano-building blocks with the continuous aggregation of nanoparticles on the porous surface.…”
Section: Discussionmentioning
confidence: 99%
“…However, at a high deposition pressure (higher than P c ), more collisions take place among the gas molecules, ions, and electrons in the plasma, which thus increase the plasma's radical density and reduce the energy of the carbon ion species. As a result, CNPs form in the dense plasma and grow as the density of the carbon radicals increases (carbon ion species), like other nanoparticles deposited via CVD processes373839. Because the energy was too low for the CNPs to penetrate the growing subsurface, the CNPs simply adhered to the growing top surface and remained in the lowest energy state of sp 2 bonding (graphite-like bonding)32, forming a porous network as nano-building blocks with the continuous aggregation of nanoparticles on the porous surface.…”
Section: Discussionmentioning
confidence: 99%
“…Charging of nanoparticles has been applied in a number of different areas, such as material synthesis, nano-structure patterning, contamination control, and particle instrumentation (e.g., Adachi, Tsukui, & Okuyama, 2003;Friedlander & Pui, 2003;Jacobs & Whitesides, 2001;Kang et al, 2004;Krinke, Fissan, Deppert, Magnusson, & Samuelson, 2001;Kulkarni, Namiki, Otani, & Biswas, 2002). A variety of aerosol charging methods have been proposed and studied for different applications.…”
Section: Introductionmentioning
confidence: 99%
“…A wide range of techniques including chemical vapor deposition (CVD), metalorganic chemical vapor deposition (MOCVD), thermal pyrolysis, etc. are generally used to synthesize zinc oxide (ZnO) nanoparticles and films [16][17][18]. In most of the cases, it is reported that ZnO nanostructures are resulted from epitaxial growth rather than isotropic nucleation.…”
Section: Introductionmentioning
confidence: 99%