2012
DOI: 10.1063/1.3699045
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Nanopatterning of mica surface under low energy ion beam sputtering

Abstract: Irradiation of crystalline muscovite mica samples by 500 eV Ar+ ions at different incident angles can induce significant surface morphological variations. A periodic ripple pattern of nano-dimensions forms in the angle window 47°-70°. On the other hand, tilted conical protrusions develop on the surface at grazing incidence angles around 80°. From the derivative of the topographic images the distribution of the side-facet slopes in the ion incidence plane are measured, which is found to be strongly related to t… Show more

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Cited by 32 publications
(19 citation statements)
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“…In addition, a weak peak of C is observed due to surface contamination or absorption of environmental carbon. The presence of all the elements in the virgin mica was also previously reported . The peak intensities of different elements change for both Ar + and N + bombardment (Figure A) due to the differential sputtering rate of mica elements.…”
Section: Resultssupporting
confidence: 81%
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“…In addition, a weak peak of C is observed due to surface contamination or absorption of environmental carbon. The presence of all the elements in the virgin mica was also previously reported . The peak intensities of different elements change for both Ar + and N + bombardment (Figure A) due to the differential sputtering rate of mica elements.…”
Section: Resultssupporting
confidence: 81%
“…The large depletion of positively charged K ions of the top layer of the mica surface by ion bombardment leads to adsorb hydrocarbon when the surface is exposed in the ambient atmosphere. The K depletion and C adsorption on mica after ion bombardment were also previously observed . The high‐resolution XPS core level spectra of C 1s for the virgin as well as Ar + and N + bombarded mica are shown in Figure A‐C.…”
Section: Resultssupporting
confidence: 68%
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“…These observations are consistent with the earlier data reported for 500 eV Ar þ on mica. 16 Both the threshold incidence angle h c and the critical angle of pattern rotation appear to be independent of the projectile energy. Figure 2 presents the phase diagram of patterns formed on Ar þ ion bombarded mica surfaces as a function of ion energy E and incidence angle h. Each morphological pattern is marked by a typical symbol.…”
mentioning
confidence: 97%