2019
DOI: 10.1088/1361-6528/ab068e
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Nanoplasmonic response of porous Au-TiO2 thin films prepared by oblique angle deposition

Abstract: In this work, a versatile method is proposed to increase the sensitivity of optical sensors based on the localized surface plasmon resonance (LSPR) phenomenon. It combines a physical deposition method with the oblique angle deposition technique, allowing the preparation of plasmonic thin films with tailored porosity. Thin films of Au-TiO 2 were deposited by reactive magnetron sputtering in a 3D nanostructure (zigzag growth), at different incidence angles (0°α80°), followed by in-air thermal annealing at 40… Show more

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Cited by 35 publications
(39 citation statements)
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“…A closer look to the transmittance spectra seems to suggest that the "envelope" of interference fringes suffers some changes (reduction) as the incidence angle increases. This behaviour is surely related to the increase of the film's porosity (demonstrated later in this manuscript), that led to a density reduction and thus to a decrease of the effective refractive index of the material [59,66].…”
Section: Zno Thin Films Characterizationmentioning
confidence: 58%
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“…A closer look to the transmittance spectra seems to suggest that the "envelope" of interference fringes suffers some changes (reduction) as the incidence angle increases. This behaviour is surely related to the increase of the film's porosity (demonstrated later in this manuscript), that led to a density reduction and thus to a decrease of the effective refractive index of the material [59,66].…”
Section: Zno Thin Films Characterizationmentioning
confidence: 58%
“…The ZnO thin films were deposited by reactive DC magnetron sputtering in a custom-made highvacuum (10 -4 Pa) deposition system, equipped with a GLAD sample holder ( Fig. 1a) [59]. The thin films were deposited on glass lamellae (ISO8037) and in monocrystalline silicon (Si) wafers with (100) orientation.…”
Section: Production and Characterization Of Zno Thin Filmsmentioning
confidence: 99%
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