Abstract:Solid-state nanopores (SSNPs) of on-demand shape and size can facilitate desired sensor performance. However, reproducible production of arrayed nanopores of predefined geometry is yet to demonstrate despite of numerous methods explored. Here, bowl-shape SSNPs combining unique properties of ultrathin membrane and tapering geometry are demonstrated. The bowl-SSNP upper opening is 100-120 nm in diameter, with the bottom opening reaching sub-5 nm. Numerical simulation reveals the formation of multiple electroosmo… Show more
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