Fabrication of solid-state nanopores and its perspectivesNanofluidics is becoming an extensively developing technique in the field of bioanalytical chemistry. Nanoscale hole embed in an insulating membrane is employed in a vast variety of sensing platforms and applications. Although, biological nanopores have several attractive characteristics, in this paper, we focused on the solid-state nanopores due to their advantages as high stability, possibility of diameter control, and ease of surface functionalizing. A detection method, based on the translocation of analyzed molecules through nanochannels under applied voltage bias and resistive pulse sensing, is well established. Nevertheless, it seems that the new detection methods like measuring of transverse electron tunneling using nanogap electrodes or optical detection can offer significant additional advantages. The aim of this review is not to cite all related articles, but highlight the steps, which in our opinion, meant important progresses in solid-state nanopore analysis.
Keywords:Fabrication / Nanofluidics / Selectivity / Sensors / Solid-state nanopores / Surface charge DOI 10.1002/elps.201400612
IntroductionNanopore analysis is a young and rapidly developing discipline with incredibly versatile applications (Fig. 1A). Undoubtedly, it has the potential to considerably change the way we think about many fields of science-medicine, chemistry, and biology. It took inspiration from biological processes of molecular transport through nanoscale pores (nanopores) and utilizes this phenomenon as analytical tool. Nucleus and surface of living cells are covered with distinct types of pore-forming proteins. They mediate the transport in order to maintain cell functions. In late 70s, Sakmann and Neher patch-clamped single ion channel, one type of pore-forming membrane proteins, and for the first time they observed single channel conductance [1]. Although, their aim was to investigate cell physiology, two decades later these measurements created the basis of nanopore sensing. Second distinct group of pore-forming proteins is some bacterial exotoxins, which represents an extremely effective tool to lyse the cells. They are able to oligomerize in lipid membranes and create there a nongating permeable pore.Correspondence: Professor Rene Kizek, Department of Chemistry and Biochemistry, Faculty of Agronomy, Mendel University in Brno, Zemedelska 1, CZ-613 00 Brno, Czech Republic E-Mail: kizek@sci.muni.cz Fax: +420-545-212-044Abbreviations: ALD, atomic layer deposition; EBID, electron beam-induced deposition; EBL, electron beam lithography; FIB, focused ion beam; SAM, self-assembled monolayer; SiNx, silicon-rich nitride; STM, scanning tunneling microscopy; TEM, transmission electron microscope Kasianowicz and coworkers were the first who used nanopores as a sensor [2]. They embedded a single ␣-hemolysin protein, secreted by Staphylococcus aureus (Fig. 1Ba), to a lipid bilayer and suggested that the individual nucleotides in polynucleotide chain passing through pore in electri...