Nanopositioning and Nanomeasuring Machine for Multi-Sensor Applications

Abstract

In micro-and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nano measuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.

Calibration of the Ultrasonic Sensor-Range Finder by the Laser Interferometer

“…The ultrasonic distance sensor UGT593 ( Fig. 1) of IFM Company, Germany, production has to be tested with the help of a specially designed measuring installation based on a laser interferometer MI 60 from SIOS, Germany [3]. Optical interferometers are considered as quite common instruments for measuring the wavelengths of spectral lines, refractive indices of transparent media, absolute and relative lengths, and angular sizes of stars, for controlling the quality of optical units and their surfaces, state of the surfaces, and so on.…”