“…The lowest thermal conductivity was found at the fluence of 7 · 10 14 ions/cm 2 and the highest electrical conductivity was found at the same fluence. RBS measurement was performed using 2.1 MeV He + ions in an IBM scattering geometry with the particle detector placed at 170°from the incident beam to monitor the film thickness and stoichiometry before and after 5 MeV Si ions bombardments [1,10,11].…”