2007
DOI: 10.1007/s10832-007-9045-2
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Nanoscale characterization of polycrystalline ferroelectric materials for piezoelectric applications

Abstract: In this work, the nanoscale electromechanical properties of several important piezoelectric materials [as exemplified by PbZr x Ti 1−x O 3 (PZT)] suitable for both bulk actuator and microelectromechanical system (MEMS) applications are reported. The investigations are performed by the piezoresponse force microscopy (PFM) that is currently the most suitable tool for both ferroelectric domain imaging and local piezoelectric studies. The local piezoresponse of individual grains is measured in PZT films and compar… Show more

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Cited by 51 publications
(39 citation statements)
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“…2c). The domain growth is similar to the schematic representation of domain growth for the thermodynamic model with pinning [11] and experimental results [10].…”
Section: Local Switching Of Pfmsupporting
confidence: 68%
“…2c). The domain growth is similar to the schematic representation of domain growth for the thermodynamic model with pinning [11] and experimental results [10].…”
Section: Local Switching Of Pfmsupporting
confidence: 68%
“…The contrast of signal with phase depends on both the amplitude of piezoelectric coefficient and polarization deflection. The bright areas on the phase image illustrate polarization directed towards the bottom electrode while dark areas correspond to the domains of opposite direction [37]. In this case, vertical PFM scanning was performed on the sample of SBNLT-30 with a chosen area of 5 × 5 µm 2 .…”
Section: Microstructure Discussionmentioning
confidence: 99%
“…1(c)), yields information on the vertical (lateral) component of the polarization, an approach referred to as vertical (lateral) PFM. [47,48] On the basis of the operational mechanism, vertical and lateral PFMs can provide profound insight into nanoscale ferro/piezoelectric phenomena such as piezoelectricity, [49][50][51][52] polarization switching dynamics, [53][54][55][56] domain growth, and wall motions. [57][58][59][60] Three-dimensional domain structures can also be explored by combining vertical and lateral PFMs.…”
Section: Principle Of Pfmmentioning
confidence: 99%