2014
DOI: 10.1021/nl502998z
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Nanoscale Conducting Oxide PlasMOStor

Abstract: We experimentally demonstrate an ultracompact PlasMOStor, a plasmon slot waveguide field-effect modulator based on a transparent conducting oxide active region. By electrically modulating the conducting oxide material deposited into the gaps of highly confined plasmonic slot waveguides, we demonstrate field-effect dynamics giving rise to modulation with high dynamic range (2.71 dB/μm) and low waveguide loss (∼0.45 dB/μm). The large modulation strength is due to the large change in complex dielectric function w… Show more

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Cited by 284 publications
(268 citation statements)
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References 46 publications
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“…Research on plasmonics has become a flourishing field with numerous applications [11,12], including metamaterials and metasurfaces [13,14], sub-diffraction-limited imaging [15], lasers [16], and cloaking [17]. Plasmonics could also be used to enhance the performance of photovoltaic devices [18,19], photodetectors and modulators [2,20], and environmental sensors [21,22].…”
Section: Introductionmentioning
confidence: 99%
“…Research on plasmonics has become a flourishing field with numerous applications [11,12], including metamaterials and metasurfaces [13,14], sub-diffraction-limited imaging [15], lasers [16], and cloaking [17]. Plasmonics could also be used to enhance the performance of photovoltaic devices [18,19], photodetectors and modulators [2,20], and environmental sensors [21,22].…”
Section: Introductionmentioning
confidence: 99%
“…This corresponds to a high background carrier concentration of the order 10 19 − 10 21 / cm 3 and it dictates the use of dielectric materials with high electrical breakdown fields. The TCO we investigate in this work is indium tin oxide (ITO), which has been studied extensively in the literature [32,33,[38][39][40][41]. We model ITO with a Drude model, which provides an adequate and accurate description of its permittivity in the visible-IR regime [32,33,39,41,42].…”
Section: A Electronic Properties: High-strength Dielectrics and Tcosmentioning
confidence: 99%
“…The TCO we investigate in this work is indium tin oxide (ITO), which has been studied extensively in the literature [32,33,[38][39][40][41]. We model ITO with a Drude model, which provides an adequate and accurate description of its permittivity in the visible-IR regime [32,33,39,41,42]. ITO can be heavily doped using rf sputter deposition, yielding a carrier concentration in the range 10 19 − 10 21 / cm 3 with a plasma frequency in the infrared range.…”
Section: A Electronic Properties: High-strength Dielectrics and Tcosmentioning
confidence: 99%
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“…Since they support waveguide modes which are confined in a region with dimensions smaller than the diffraction limit, they can be used to implement highly integrated optoelectronic devices. [1][2][3][4] For this reason, they have attracted a lot of attention for more than a decade. While a plethora of nanoplasmonic waveguides have been studied, silicon-based hybrid plasmonic waveguides are prominent.…”
mentioning
confidence: 99%