Nanoscale dielectric properties of TiO2 in SiO2 nanocomposite deposited by hybrid PECVD method
C Villeneuve-Faure,
M Mitronika,
A P Dan
et al.
Abstract:In this paper, nanocomposites (TiO2 in SiO2) are produced by an advanced hybrid aerosol-PECVD method based on direct liquid injection of a non-commercial colloidal solution in an O2 / hexamethyldisiloxane (HMDSO) low-pressure plasma. Dielectric properties are investigated at nanoscale using techniques derived from Atomic Force Microcopy in terms of relative dielectric permittivity, charge injection and transport. Results show that a concentration in TiO2 up to 14% by volume makes it possible to increase the re… Show more
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