Nanoscale friction behavior and deformation during copper chemical mechanical polishing process

Ngo, Thi-Thuy Binh; Nguyen, Van-Thuc; Fang, Te-Hua

doi:10.1007/s00894-023-05699-x

J Mol Model

2023

DOI: 10.1007/s00894-023-05699-x

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Nanoscale friction behavior and deformation during copper chemical mechanical polishing process

Thi-Thuy Binh Ngo,

Van-Thuc Nguyen,

Te-Hua Fang

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2024

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Cited by 2 publications

References 38 publications

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Effect of constrained conditions, crystallographic and geometric factors on deformation patterns in FCC single crystals. Molecular dynamics study

Lychagin,

Yu. Nikonov,

Dmitriev

2024

Computational Materials Science

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Effect of constrained conditions, crystallographic and geometric factors on deformation patterns in FCC single crystals. Molecular dynamics study

Lychagin,

Yu. Nikonov,

Dmitriev

2024

Computational Materials Science

View full text Add to dashboard Cite

The fluidic molecular trajectory and the Nano-droplet production ability

Nguyen,

Hoang

et al. 2024

Int. J. Simul. Multidisci. Des. Optim.

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This paper studies the liquid Nano-droplet production ability using molecular dynamics simulation methodology. The research parameter is performed at the temperature of 310 Kelvin (K), the pressing force of 10.0 × 10−10 Newton (N) and the ejective hole diameters of 25 and 40 Angstrom (Å). The research result shows that liquid Nano-droplets finally were not produced for the ejective diameter of 25 Å. The Nano-jets were not only non-destruction from nozzle’s surface to produce the droplets but also movement downward to come back the nozzle’s surface. The molecular trajectory is very zigzag and curved both inside and outside the ejective container. In the contrary, when increasing the ejective diameter to 40 Å, the liquid Nano-droplet was produced in the same the ejective time and compressible force magnitude. The molecular trajectory is quite straight after ejecting out the outside of the container. Meanwhile, for the nozzle diameter size of 40 Å, the Nano-droplet was not only production but also movement up to leave away the nozzle’s surface under same above conditions. That proves that the ejective diameter has the influences to the moveable direction and Nano-droplets formation ability in the whole ejective process.

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Nanoscale friction behavior and deformation during copper chemical mechanical polishing process

Cited by 2 publications

References 38 publications

Effect of constrained conditions, crystallographic and geometric factors on deformation patterns in FCC single crystals. Molecular dynamics study

Effect of constrained conditions, crystallographic and geometric factors on deformation patterns in FCC single crystals. Molecular dynamics study

The fluidic molecular trajectory and the Nano-droplet production ability

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