2023
DOI: 10.1038/s41467-023-36936-9
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Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Abstract: Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individu… Show more

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Cited by 4 publications
(2 citation statements)
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“…The quantum microscopy is based on the control of waves of light. The transmissionmode microwave impedance microscopy can be implemented on AFM to characterize the cantilever-based resonators for the application of quantum information science [54]. AFM photonic equipments with diverse micro-cantilever designs can also be tested to demonstrate the behaviours of the micro-cantilever at the fundamental in-plane mode at 25 MHz [55].…”
Section: Responses To Varying Fluid Propertiesmentioning
confidence: 99%
“…The quantum microscopy is based on the control of waves of light. The transmissionmode microwave impedance microscopy can be implemented on AFM to characterize the cantilever-based resonators for the application of quantum information science [54]. AFM photonic equipments with diverse micro-cantilever designs can also be tested to demonstrate the behaviours of the micro-cantilever at the fundamental in-plane mode at 25 MHz [55].…”
Section: Responses To Varying Fluid Propertiesmentioning
confidence: 99%
“…Conventionally, acoustic cavities are actuated by electric field, ,, continuous laser-induced radiation pressure, or heating effects. , The cavity resonance can be probed by techniques such as laser interferometry , and the piezoresistance effect . The bandwidth of these methods is limited from megahertz to a few gigahertz.…”
mentioning
confidence: 99%