2022
DOI: 10.1063/5.0078914
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Nanoscale multiply charged focused ion beam platform for surface modification, implantation, and analysis

Abstract: The PELIICAEN (Platform for the Study of Ion Implantation Controlled and Analyzed at the Nanometric Scale) setup is a unique device, both for all of its in situ ultra-high vacuum equipment (focused ion beam column, secondary electron microscope, atomic force microscope, and scanning tunneling microscope) and for its nanostructuration performances on materials. The setup has been recently equipped with its own electron cyclotron resonance ion sources, a new position-controlled platform using pneumatic vibration… Show more

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