2008
DOI: 10.1002/adma.200702326
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Nanoscale Patterning and Electronics on Flexible Substrate by Direct Nanoimprinting of Metallic Nanoparticles

Abstract: Recent years have witnessed an expanding interest in the application of flexible polymer materials (e.g., polyimide, polyester, etc.) as the substrates for electronic and display devices. These applications include flexible organic light-emitting displays, [1,2] thin film transistors, [3][4][5] sensors, [6,7] and polymer MEMS. [8,9] The advantages of polymer-based materials are their mechanical flexibility, light weight, enhanced durability, and low cost compared with rigid materials (such as silicon and quart… Show more

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Cited by 175 publications
(134 citation statements)
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“…33 The specific benefits of this process are as follows: it is based on the use of PDMS soft molds that are low-cost, easily replicable, and highly customizable. 28,[34][35][36] Furthermore, they often do not require surfactant pretreatment, as opposed to expensive pretreated rigid molds; the soft, non-sticking, PDMS mold enables conformal contact with the substrates even at very low pressures, 30,36 which makes Here, we report the results of a study of the application of low pressure, soft mold, reverse NIL to make regular arrays of ferroelectric nanopillars of P(VDF-TrFE) on substrates of polyethylene terephthalate (PET) coated with indium-tin-oxide (ITO) electrodes. Our results demonstrate that the P(VDF-TrFE) nanopillar arrays were faithful and uniform replicas of the PDMS mold over large areas of at least 200 mm  200 mm, with no detectable residual layer.…”
Section: Introductionmentioning
confidence: 99%
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“…33 The specific benefits of this process are as follows: it is based on the use of PDMS soft molds that are low-cost, easily replicable, and highly customizable. 28,[34][35][36] Furthermore, they often do not require surfactant pretreatment, as opposed to expensive pretreated rigid molds; the soft, non-sticking, PDMS mold enables conformal contact with the substrates even at very low pressures, 30,36 which makes Here, we report the results of a study of the application of low pressure, soft mold, reverse NIL to make regular arrays of ferroelectric nanopillars of P(VDF-TrFE) on substrates of polyethylene terephthalate (PET) coated with indium-tin-oxide (ITO) electrodes. Our results demonstrate that the P(VDF-TrFE) nanopillar arrays were faithful and uniform replicas of the PDMS mold over large areas of at least 200 mm  200 mm, with no detectable residual layer.…”
Section: Introductionmentioning
confidence: 99%
“…25,26 These drawbacks lead to low throughput and poor pattern uniformity in large arrays. 27,28 In addition, the conventional nanoimprint procedure usually requires an additional etching process to remove a residual polymer layer left between the imprinted structures. 29,30 This extra etching process may also be incompatible with flexible substrates due to their poor etching resistance.…”
Section: Introductionmentioning
confidence: 99%
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“…Thus, variants of direct patterning methods have been developed to overcome the limitations. Some important techniques include nanotransfer printing (nTP) [1][2][3]7], direct imprinting [4,5], liquid-bridge transfer stamping (LB-nTM) [8], laser direct curing (LDC) [9] and direct ink writing [6].…”
Section: Introductionmentioning
confidence: 99%
“…Patterning of conductive media directly on a substrate has attracted much interest to overcome restrictions of indirect patterning techniques [1][2][3][4][5][6][7][8][9]. Patterning of metal on electronic devices is required for creating a conducting pass between active components or electrodes to apply potential and to receive signals [10].…”
Section: Introductionmentioning
confidence: 99%