2024
DOI: 10.1021/acs.jpcc.4c02038
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Nanoscale Sculpting of Hexagonal Boron Nitride with an Electron Beam

Rachael N. Keneipp,
Jordan A. Gusdorff,
Pia Bhatia
et al.

Abstract: Creating sub-to few-nanometer defects and nanopores in hexagonal boron nitride (hBN) opens opportunities for engineering quantum emitters and for nanofluidic and sensing applications. Using the electron beam in the aberrationcorrected scanning transmission electron microscope, we demonstrate modification, thinning, and drilling of features in few-layer hBN membranes (∼5 to 20 nm-thick). The atomic composition is monitored with electron energy loss spectroscopy, which also facilitates drift correction. We repor… Show more

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