2003
DOI: 10.1103/physrevb.68.033401
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Nanoscale self-affine surface smoothing by ion bombardment

Abstract: Topography of silicon surfaces irradiated by a 2 MeV Si$^+$ ion beam at normal incidence and ion fluences in the range $10^{15}-10^{16}$ ions/cm$^{2}$ has been investigated using scanning tunneling microscopy. At length scales below $\sim$~50 nm, surface smoothing is observed; the smoothing is more prominent at smaller length scales. The smoothed surface is self-affine with a scaling exponent $\alpha=0.53\pm0.02$.Comment: 11 pages, 4 figure

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Cited by 29 publications
(22 citation statements)
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“…These competing processes are responsible for the creation of characteristic surface features like quasiperiodic ripples and self-affine topographies [22]. The roughness exponent (a) is determined from the index, d using the rela- [20].…”
Section: Resultsmentioning
confidence: 99%
“…These competing processes are responsible for the creation of characteristic surface features like quasiperiodic ripples and self-affine topographies [22]. The roughness exponent (a) is determined from the index, d using the rela- [20].…”
Section: Resultsmentioning
confidence: 99%
“…In their example, they attributed the smoothing predominantly to irradiation-induced viscous flow. Goswami and Dev [26] observed a surface smoothening in silicon surfaces irradiated by a 2-MeV Si + ion beam. They explained the origin of irradiation induced surface smoothening as follows.…”
Section: Surface Evolution With Ion Beam Irradiationmentioning
confidence: 96%
“…They can, however, drift parallel to the surface providing an effective surface diffusion. Apparently this ion-beam induced effective surface diffusion causes nanometer-scale surface smoothing [5]. Discovery of this ion-irradiation induced nanoscale surface smoothing phenomenon leading to a self-affine fractal surface inspired further investigations [15] including the present one.…”
Section: Introductionmentioning
confidence: 97%
“…These competing processes are responsible for the creation of surface features like quasiperiodic ripple [8][9][10][11] and selfaffine fractal topographies [3][4][5]11]. In the ion mass-energy regime where sputtering is dominant, surface roughening is observed [3,4,11].…”
Section: Introductionmentioning
confidence: 99%