Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging

Gannavarpu, Rajshekhar; Bhaduri, Basanta; Edwards, Chris; Zhou, Renjie; Goddard, Lynford L.; Popescu, Gabriel

doi:10.1364/oe.22.003432

Cited by 42 publications

(25 citation statements)

References 23 publications

(24 reference statements)

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“…Combining SI with common path interferometry helped in achieving nanoscale topography of the samples, which was successfully applied for the real-time characterization of spatial light modulators [146].…”

Section: Surface Profilingmentioning

confidence: 99%

Structured illumination microscopy

2015

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Illumination plays an important role in optical microscopy. Köhler illumination, introduced more than a century ago, has been the backbone of optical microscopes. The last few decades have seen the evolution of new illumination techniques meant to improve certain imaging capabilities of the microscope. Most of them are, however, not amenable for wide-field observation and hence have restricted use in microscopy applications such as cell biology and microscale profile measurements. The method of structured illumination microscopy has been developed as a wide-field technique for achieving higher performance. Additionally, it is also compatible with existing microscopes. This method consists of modifying the illumination by superposing a well-defined pattern on either the sample itself or its image. Computational techniques are applied on the resultant images to remove the effect of the structure and to obtain the desired performance enhancement. This method has evolved over the last two decades and has emerged as a key illumination technique for optical sectioning, super-resolution imaging, surface profiling, and quantitative phase imaging of microscale objects in cell biology and engineering. In this review, we describe various structured illumination methods in optical microscopy and explain the principles and technologies involved therein.

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Section: Surface Profilingmentioning

confidence: 99%

Structured illumination microscopy

2015

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“…Here, ω cx and ω cy are angular carrier frequencies along x and y directions. Carrier fringe patterns with mathematical form described above are frequently obtained in optical techniques such as fringe projection [22,23], off-axis interferometry [2] and diffraction phase microscopy [20]. The first step in our method is to retrieve the complex analytic signal from the fringe pattern by computing a two-dimensional Fourier transform of the fringe pattern and applying spectral filtering to preserve only the side lobe centered around the carrier frequency [22].…”

Section: Theorymentioning

confidence: 99%

“…In this paper, we propose an elegant method for defect detection which eliminates the requirement of multiple phase-shifted fringe patterns, multiple training data sets or prior knowledge of thresholds, and is also computationally efficient and robust against noise. The effectiveness and utility of the proposed technique is demonstrated in diffraction phase microscopy [19,20] which is a common-path interferometric technique for non-invasive metrology. The theory of the proposed method is outlined in section 2.…”

Section: Introductionmentioning

confidence: 99%

Defect detection using windowed Fourier spectrum analysis in diffraction phase microscopy

2019

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This paper introduces a technique to identify defects from fringe patterns for optical non-destructive testing and metrology. The technique relies on computation of the windowed Fourier spectrum of the fringe pattern at a given spatial frequency, and subsequent application of automated spectrum thresholding to localize the defect. The technique offers the advantages of high robustness against noise, fast implementation, high throughput and minimal operator intervention. The performance of the proposed technique is demonstrated for identifying defects of different types and sizes under varying levels of noise using numerical simulations, and practical validity is tested using experimental interferograms obtained in diffraction phase microscopy.

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“…In the past years, quantitative phase imaging was developed and dedicated to a wide range of applications [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. Phase measurement deals with the optical path length related to propagation inside transparent specimens (transmission illumination) or to reflection on opaque surfaces (reflection illumination), and translates this data into relevant information.…”

Section: Introductionmentioning

confidence: 99%

“…Phase measurement deals with the optical path length related to propagation inside transparent specimens (transmission illumination) or to reflection on opaque surfaces (reflection illumination), and translates this data into relevant information. A lot of spectacular investigations were demonstrated in biomedical imaging [1][2][3][4][5][6][7], topology at nanoscale and nanoscopy [7,8,13], fluid mechanics [14,15], or measurement of temperatures and thermal exchanges in flames [16,17]. In such approaches, the phase retrieval is based on off-axis architecture (slight tilt between reference wave and probe wave) providing singleshot and real-time capabilities to the technique.…”

Section: Introductionmentioning

confidence: 99%

Quantitative phase imaging in flows with high resolution holographic diffraction grating

Desse¹,

Picart²,

Olchewsky³

2015

Opt. Express

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This paper proposes quantitative phase imaging by using a high resolution holographic grating for generating a four-wave shearing interferogram. The high-resolution holographic grating is designed in a "kite" configuration so as to avoid parasitic mixing of diffraction orders. The selection of six diffraction orders in the Fourier spectrum of the interferogram allows reconstructing phase gradients along specific directions. The spectral analysis yields the useful parameters of the reconstruction process. The derivative axes are exactly determined whatever the experimental configurations of the holographic grating. The integration of the derivative yields the phase and the optical thickness. Demonstration of the proposed approach is carried out for the case of the analysis of the supersonic flow of a small vertical jet, 5.56mm in diameter. The experimental results compared with those obtained with digital holography exhibit a very good agreement.

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Nanoscale topography and spatial light modulator characterization using wide-field quantitative phase imaging

Cited by 42 publications

References 23 publications

Structured illumination microscopy

Structured illumination microscopy

Defect detection using windowed Fourier spectrum analysis in diffraction phase microscopy

Quantitative phase imaging in flows with high resolution holographic diffraction grating

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