2013
DOI: 10.1016/j.sna.2013.04.022
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Nanoscale torsion-free photonic crystal pressure sensor with ultra-high sensitivity based on side-coupled piston-type microcavity

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Cited by 38 publications
(23 citation statements)
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“…Minimum detectable force is shown in figure 6.6d and is of the order of 10 −7 N which compares rather well with the high resolution PhC force sensors [153,154] exploiting coherent light. However, these schemes use significantly larger input power while in our results not only is the pulse power (1 ph/pulse) low but the average power (10 −10 W), which is defined by the emission rate of the current single photon sources (∼ GHz), is also low.…”
Section: Kn Msupporting
confidence: 66%
“…Minimum detectable force is shown in figure 6.6d and is of the order of 10 −7 N which compares rather well with the high resolution PhC force sensors [153,154] exploiting coherent light. However, these schemes use significantly larger input power while in our results not only is the pulse power (1 ph/pulse) low but the average power (10 −10 W), which is defined by the emission rate of the current single photon sources (∼ GHz), is also low.…”
Section: Kn Msupporting
confidence: 66%
“…With the results from FEM and FDTD simulations plugging into the expression in [22], the wavelength shifts are calculated to be 39.7 nm/N and 30.2 nm/N for longitudinal and transverse pressure, respectively. Furthermore, with the calculated expression in [25], the minimum detectable pressure variation δF obtained is 1.08 nN and 1.43 nN in the longitudinal and transverse direction. Compared with the ring-resonator based pressure sensor demonstrated by Zhao et al [41], where the pressure sensitivity was only 0.65 nm/N, the sensitivity presented in this work is largely enhanced.…”
Section: Results and Discussion In Longitudinal And Transverse Directionsmentioning
confidence: 64%
“…The calculated structural variation rate S h-F of the top Si-strip membrane is 0.51 nm/nN. Due to the longer length of top Si-strip membrane, larger structural variation than that in [25] is obtained under the same applied pressure F. …”
Section: Structural Variation In Upright Directionmentioning
confidence: 89%
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