2019
DOI: 10.3390/ma12010138
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Nanostructure and Optical Property Investigations of SrTiO3 Films Deposited by Magnetron Sputtering

Abstract: Strontium titanate thin films were deposited on a silicon substrate by radio-frequency magnetron sputtering. The structural and optical properties of these films were characterized by X-ray diffraction, high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and spectroscopic ellipsometry, respectively. After annealing at 600–800 °C, the as-deposited films changed from amorphous to polycrystalline. It was found that an amorphous interfacial layer appeared between the SrTiO3 layer an… Show more

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Cited by 9 publications
(7 citation statements)
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“…As can be observed in Figure a, the absorption edge of the films lie below 350 nm, characteristic of a UV absorption. The calculated band, obtained from Figure b, showed values among 3.1 and 3.2 eV, which is consistent with the reported value for cubic STO …”
Section: Resultssupporting
confidence: 90%
See 1 more Smart Citation
“…As can be observed in Figure a, the absorption edge of the films lie below 350 nm, characteristic of a UV absorption. The calculated band, obtained from Figure b, showed values among 3.1 and 3.2 eV, which is consistent with the reported value for cubic STO …”
Section: Resultssupporting
confidence: 90%
“…The calculated band, obtained from Figure 4b, showed values among 3.1 and 3.2 eV, which is consistent with the reported value for cubic STO. 47 Solar Driven Photoelectrochemical Water Splitting on STO Electrodes. For evaluating the potential photoelectrochemical applications of STO films prepared by AP-PECVD, polarization curves were obtained using chopped linear voltammetry analysis (Figure 5) using the photoelectrochemical setup showed in Figure S7.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…Moreover, the FHA modified samples were significantly different from the Mg and Mg/Ta samples and revealed a nano-needle-like structure. In the Mg/FHA/Ta group, the nano-needle-like structure was noted to be thick, and the layer consisted of nanoparticles which had been confirmed by previous studies ( Tang et al, 2013 ; Lu et al, 2019 ; Xu et al, 2019 ). In addition, the diameter of the needles on the surface and bottom layers was 20 and 40 nm respectively, observed by the SEM images.…”
Section: Resultssupporting
confidence: 82%
“…1(a), with lattice constants of a ¼ b ¼ c ¼ 3.905Å, b ¼ 90.00 are consistent with the experimental results found by Nelmes et al 64 For comparison, other experimental and theoretical lattice constants along with the band gap are listed in Table 1. 54,55,65,66 The band structure of cubic SrTiO 3 is shown in Fig. 2(a), and the calculated indirect band gap of 3.252 eV is very close to the experimental data of 3.22-3.25 eV at room temperature.…”
Section: Resultssupporting
confidence: 71%