-We report a method of fabricating a nano-sized stack alignment layer. The stacked alignment layer consists of nano-domains of vertical and planar alignment materials. Experiments reveal that photoalignment thin film can undergo dewetting and form discrete nano-sized domains. Such selforganized structure creates a discontinuous layer stacked on top of a continuous layer and hence produces an inhomogeneous alignment surface. With two or more different principle alignment directions, this new alignment layer is capable of producing multiple pretilt and azimuth angle domains on a single substrate.Keywords -photoalignment, pretilt angle, azimuth angle, stacked layers, liquid crystal alignment, dewetting, nanostructured.DOI # 10.1002/jsid.374Liquid crystal (LC) alignment layer, which controls the LC molecule orientations on the panel surfaces, is one of the most important element to LC display. At present, numerous methods had been proposed for generating pretilt angles in the range of 30°-60°. 1-6 However, there were only a few attempts to produce both variable pretilt and azimuth angles.4-6 Jong et al. 4 had proposed to control the pretilt angles via ion beam irradiation of silicon carbide (SiC) layers of various compositions. The azimuth angle could be controlled by in-plane projection of the particle beam; but the produced pretilt angle only had a limited range of 67°to 90°. Yaroshchuk et al.5 had suggested using plasma beam irradiation to a fluorinated polyimide. Although the produced pretilt angle could be varied from 0°to 90°, the processing window for intermediate values, 30°-60°, was narrow. The transition was nonlinear and like a step function. The azimuth angle had also showed an abrupt change from parallel to perpendicular with respect to the plane of incidence of the plasma beam. In addition, the oblique irradiation might not be favorable to large-area substrate. The spatial reliability remained to be an issue. Ho et al.6 had attempted to generate variable pretilt angles by photoaligning a mixed polyimide. The nano-domains were formed by phase segregation during the drying of mixed fluids.7 The processing was rather simple, but the repeatability was unsatisfactory because of the uncertainty of the precipitation rate. Hence, in this paper, we would like to propose a stacked nanostructured surface that can fulfill this technology gap. The stacked nanostructured surface is preferable for large-area substrate and is highly reliable. The produced pretilt and azimuth angles can be varied from nearly 0°to 90°. In addition, the processing window is large as the angles are linearly proportional to the nano-domain area ratios. Moreover, we introduce thin film dewetting mechanism for self-generating the nano-domains without resorting to micro-fabrication techniques. The nano-domains of one alignment material are formed on top of another continuous alignment material. Hence, it has a stacked structure with only one additional coating step, which is compatible with existing manufacturing technique. The modeli...