2023 ІМФ (Інститут металофізики ім. Г. В. Курдюмова НАН України) Надруковано в Україні. 74 О. К. ШУАІБОВ, О. Й. МИНЯ, Р. В. ГРИЦАК, А. О. МАЛІНІНА та ін.films, which can be deposited on a solid dielectric substrate installed near the electrode system. The results of the study of the optical characteristics of the overstressed nanosecond discharge at the value of the discharge interval d2 mm are presented. Identification of plasma radiation spectra allows establishing the main excited plasma products, which form the spectrum of UV radiation of plasma and act simultaneously as a pulsed source of clusters and small particles of zinc oxide. The method of numerical modelling of plasma parameters of the zinc and oxygen vapour discharge, which is based on the solution of the Boltzmann kinetic equation for the electron-energy distribution function, is used to calculate the plasma parameters (T e -temperature, N e -electron density, rate constants of electronic reactions) depending on the value of the E/N ratio (where E-electric field strength, N-total concentration of discharge particles).