1998
DOI: 10.12693/aphyspola.93.437
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Nanostructuring and Hardness Investigations of Thin Films by Scanning Force Microscopy

Abstract: The scanning force microscope was used to scratch thin films and to write nanoscale pattern on surfaces as well as to perform nanoindentation for hardness measurements. Different thin film materials such as C60 films, diamond-like carbon, metals and semiconducting films have been investigated.

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