Nanostructuring of ITO thin films through femtosecond laser ablation

Şahin, Ramazan; Kabaçelik, Ismail

doi:10.1007/s00339-016-9847-7

Cited by 12 publications

(4 citation statements)

References 30 publications

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“…The fabrication of surface structures on silica includes techniques such as wet, dry [12,13], and vapor etching. [14,15] Wafer-scale processing methods such as reactive ion etching and lithographically defined wet/dry etching can be adapted for silica. [1] Recently, dry etching followed by HF-based wet etching is used to produce high-quality optical surfaces.…”

Section: Introductionmentioning

confidence: 99%

Transmittance modulation by gold nanoparticle mediated wet chemical etching of silica

Thomas

Swaminathan

2023

Preprint

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Wet etching in hydrofluoric acid (HF) is one of the most common routes for the surface texturing of silica, leading to improved optical properties, which find applications in several fields. In this work, wet etching of silica is mediated by the deposition of chemically synthesized gold nanoparticles on the substrate. Nanoparticles of different sizes are coated on silica and act as a mask when etching using HF. The effect of parameters such as etching time, nanoparticle size, and HF concentration on the surface morphologies and transmittance are studied and correlated with the chemical etching mechanism. This work reveals that a proper choice of masking and etching conditions can reduce the optical transmission of silica. Etching leads to the formation of arrays of micron-size elongated pits. The pit width and surface roughness are found to increase with etching time and HF concentration, in turn leading to a decrease in transmittance. The results show that nanoparticle masking is an effective way to modulate silica etching and in turn, reduce the transmittance of the substrate

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Section: Introductionmentioning

confidence: 99%

Transmittance modulation by gold nanoparticle mediated wet chemical etching of silica

Thomas

Swaminathan

2023

Preprint

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“…Nowadays, since the standard method possesses some limitations (such as optical aberrations, necessity of very fine control of sample positioning or reducing the wavelength of laser source) in practice [25], the laser processing of materials at nano-or micro-scale dimensions has been undergoing a revolution to employ of diffractionfree Bessel beams [26][27][28][29][30] in which a very small central spot with a longer depth of focus can be simultaneously achieved. Diffraction-free (Bessel) beams possesses an electrical field distribution in the transverse plane given by the J 0 is the zeroth order Bessel function of first kind as in Eq.…”

Section: A Introductionmentioning

confidence: 99%

Direct micro-structuring of Si(111) surfaces through nanosecond laser Bessel beams

2020

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We present here a nanosecond laser ablation of Si(111) wafer with diffraction-free (Bessel-J0) beams. First, the Axicon a conical shaped optical element for beam shaping is characterized with a visible and infrared light sources. Then, ablation profiles are obtained with Bessel beams generated for α = 1 • and α = 20 • base angles, then they are characterized via a Scanning Electron, an Atomic Force and an Optical Interferometric Microscopes. Experimental results compared with theoretical predictions obtained by using Bessel functions. Results show that Bessel beams give possibility of straightforward micro-structuring of Si(111) samples because the only central spot of Bessel beams could damage the surface provided that the laser pulse energy becomes in energy-range we found in our experiments. Moreover, our results clearly indicate that reduced HAZ area due to thermal expansion in ns pulse regime are natural outcome of Bessel beams as opposed to Gauss beams of same spot size. Lastly, nanosecond pulses indicate two-ablation regimes regarding the pulse energy, the quality of structures can be enhanced by using high quality Gauss beams (M 2 ≈ 1) and the size of fabricated structures can be much reduced by using larger base angle of Axicon (such as α = 40 • ) in our scheme.

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“…Bessel/Bessel vortex beams yield a submicron central spot/central ring with an extended depth of focus simultaneously, and ultrafast lasers are capable of * Correspondence: ramazansahin@akdeniz.edu.tr damaging any kind of materials. Therefore, direct patterning of thin films [16,17], single-layer graphene [18][19][20], and bulk glasses [10] at nanoscale dimensions could be achieved by joining these two techniques together.…”

Section: Introductionmentioning

confidence: 99%

“…Considering its simplicity and energy efficiency, using conical lenses (axicons) is the most appropriate technique in order to convert Laguerre-Gaussian beams to Bessel beams [24]. Although the majority of experimental studies consist of producing zeroth-order Bessel beams [10,[16][17][18], recent studies show that higher-order Bessel beams [15,25,26] are of interest to the research community. Since zeroth order Bessel beams and higher-order Bessel beams possess different electric field profiles in the transverse plane, zeroth-order and higher-order beams are classified as Bessel beams and Bessel vortex beams, respectively.…”

Section: Introductionmentioning

confidence: 99%

Bessel and Bessel vortex beams generated by blunt-tip axicon

Şahin¹

2018

Turk J Phys

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A theoretical prediction of the propagation characteristics of Laguerre-Gaussian beams after passing through a blunt-tip axicon is presented. An ideal axicon generates theoretically perfect diffraction-free and smooth-on-axis intensity Bessel beams, while experiments and calculations show that a zeroth-order Bessel beam deviates from its perfect behavior. Strong intensity modulation occurs due to interference around the center of the beam. The origin of these oscillations should be explored to increase the quality of beam shaping. This research shows that these oscillations can be reduced by stopping the beam center for a small portion or by optimizing input beam parameters. On the other hand, since they have singularity at the beam center, higher-order Bessel beams would be affected less by the bluntness of the axicon. In order to prove this idea, a series of calculations with wavelengths of 1030, 515, and 343 nm were conducted. The tip of the axicon was modeled as a hyperbola with a base angle of 0.5 •. Our calculations indicate that zeroth-order Bessel beams are much more sensitive than the higher-order Bessel beams to axicon bluntness. Moreover, not only the axicon geometry and wavelength of the illuminating light, but also the input beam parameters are quite important when enhancing the quality of beam shaping.

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Nanostructuring of ITO thin films through femtosecond laser ablation

Cited by 12 publications

References 30 publications

Transmittance modulation by gold nanoparticle mediated wet chemical etching of silica

Transmittance modulation by gold nanoparticle mediated wet chemical etching of silica

Direct micro-structuring of Si(111) surfaces through nanosecond laser Bessel beams

Bessel and Bessel vortex beams generated by blunt-tip axicon

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