Nanostructuring of titanium oxide thin film by UV femtosecond laser beam: From one spot to large surfaces

Talbi, Abderazek; Tameko, Cyril Tchiffo; Stolz, Arnaud; Millon, Éric; Boulmer‐Leborgne, C.; Semmar, Nadjib

doi:10.1016/j.apsusc.2017.02.033

Cited by 21 publications

(6 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The results exhibited the formation of regular points and laser induced periodic surface structures (LIPSS) with periods close to the period of the beam wavelength. After 13,000 shots, at a very low flux of 15 mJ cm −2 , a two-dimensional dot with a diameter of 100 nm can be obtained with two different periods (260 and 130 nm) [271]. TiO 2 has been one of the most studied semiconductors due to its high requirements for various functional photocatalysts in environmental applications, and highlights the application of multiphase photocatalysts.…”

Section: Laser Equimentmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

et al. 2019

View full text Add to dashboard Cite

Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

show abstract

Section: Laser Equimentmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

et al. 2019

View full text Add to dashboard Cite

show abstract

“…When the LSFL exhibit a period Λ L larger than half of the laser irradiation wavelength λ i /2, generally oriented perpendicular to the laser polarization, the HSFL show a periodicity Λ H lower than half of the laser irradiation wavelength. Using shorter irradiation wavelength results in lower ripple periodicity, for both LSFL and HSFL, and recent cutting-edge developments in ultraviolet (UV) fs lasers unlock sharper surface structuring with enhanced optical, chemical or mechanical effects 3,[10][11][12] . To characterized these nanostructures Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) are the gold standard tools but are challenging on dielectric or fragile samples that cannot be metalized or when LIPSS amplitude is of interest.…”

Section: Introductionmentioning

confidence: 99%

Nondestructive inspection of surface nanostructuring using label-free optical super-resolution imaging

Aguilar

Khalil

Pallarés-Aldeiturriaga

et al. 2023

Preprint

View full text Add to dashboard Cite

Ultrafast laser processing can induce surface nanostructurating (SNS) in most materials with dimensions close to the irradiation laser wavelength. In-situ SNS characterization could be key for laser parameter’s fine-tuning, essential for the generation of complex and/or hybrid nanostructures. Laser Induced Periodic Surface Structures (LIPSS) created in the ultra-violet (UV) range generate the most fascinating effects. They are however highly challenging to characterize in a non-destructive manner since their dimensions can be as small as 100 nm. Conventional optical imaging methods are indeed limited by diffraction to a resolution of ≈ 150 nm. Although optical super-resolution techniques can go beyond the diffraction limit, which in theory allows the visualization of LIPSS, most super-resolution methods require the presence of small probes (such as fluorophores) which modifies the sample and is usually incompatible with a direct surface inspection. In this paper, we demonstrate that a modified label-free Confocal Reflectance Microscope (CRM) in a photon reassignment regime (also called re-scan microscopy) can detect sub-diffraction limit LIPSS. SNS generated on a titanium sample irradiated with a λ=257 nm femtosecond UV-laser were characterized with nanostructuring period ranging from 105 nm to 172 nm. Our label-free, non-destructive optical surface inspection was done at 180μm²/s, and the results are compared with commercial SEM showing the metrological efficiency of our approach.

show abstract

“…Laser patterning can be a powerful technique for high-resolution surface nano-engineering [ 9 , 10 , 11 , 12 ]. It is a non-contact, mask-less, and flexible/versatile method with direct generation of micro- and nano-structures called laser-induced periodic surface structures (LIPSSs) observed on a wide range of materials, such as semiconductors [ 13 , 14 ], metals and alloys [ 15 , 16 , 17 , 18 , 19 ], metal oxides [ 20 , 21 , 22 , 23 ], inorganic compounds [ 24 , 25 ], and polymers [ 26 ]. Micro- and nano-structures could also be simultaneously observed in hierarchical patterns [ 19 , 24 ].…”

Section: Introductionmentioning

confidence: 99%

Polystyrene Thin Films Nanostructuring by UV Femtosecond Laser Beam: From One Spot to Large Surface

et al. 2021

View full text Add to dashboard Cite

In this work, direct irradiation by a Ti:Sapphire (100 fs) femtosecond laser beam at third harmonic (266 nm), with a moderate repetition rate (50 and 1000 Hz), was used to create regular periodic nanostructures upon polystyrene (PS) thin films. Typical Low Spatial Frequency LIPSSs (LSFLs) were obtained for 50 Hz, as well as for 1 kHz, in cases of one spot zone, and also using a line scanning irradiation. Laser beam fluence, repetition rate, number of pulses (or irradiation time), and scan velocity were optimized to lead to the formation of various periodic nanostructures. It was found that the surface morphology of PS strongly depends on the accumulation of a high number of pulses (103 to 107 pulses) at low energy (1 to 20 µJ/pulse). Additionally, heating the substrate from room temperature up to 97 °C during the laser irradiation modified the ripples’ morphology, particularly their amplitude enhancement from 12 nm (RT) to 20 nm. Scanning electron microscopy and atomic force microscopy were used to image the morphological features of the surface structures. Laser-beam scanning at a chosen speed allowed for the generation of well-resolved ripples on the polymer film and homogeneity over a large area.

show abstract

Nanostructuring of titanium oxide thin film by UV femtosecond laser beam: From one spot to large surfaces

Cited by 21 publications

References 27 publications

The Fabrication of Micro/Nano Structures by Laser Machining

The Fabrication of Micro/Nano Structures by Laser Machining

Nondestructive inspection of surface nanostructuring using label-free optical super-resolution imaging

Polystyrene Thin Films Nanostructuring by UV Femtosecond Laser Beam: From One Spot to Large Surface

Contact Info

Product

Resources

About