Nanotechnologie Und Nanoprozesse 2016
DOI: 10.1007/978-3-662-48908-6_7
|View full text |Cite
|
Sign up to set email alerts
|

Nanostrukturierung

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2024
2024
2024
2024

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(2 citation statements)
references
References 84 publications
0
2
0
Order By: Relevance
“…While piezoelectric microswitches are widely integrated into electronic devices, the incessant pursuit of reducing device size in line with Moore's law [89] poses limitations to their practical application in the future. To address this, a transition from microscale to nanoscale is necessary, ensuring compatibility with nanotechnology and nanoelectronics applications [20,21] piezoelectric nanoswitches, which integrate electrical and mechanical properties on the nanoscale, collectively termed NEMS, a category encompassing nanotechnologies [21,90,91]. However, NEMS devices are still in the research and development phase, necessitating a thorough exploration of electricalmechanical interactions within NEMS arrays and their switching times [22,23].…”
Section: Piezoelectric Nanoswitch Applicationsmentioning
confidence: 99%
See 1 more Smart Citation
“…While piezoelectric microswitches are widely integrated into electronic devices, the incessant pursuit of reducing device size in line with Moore's law [89] poses limitations to their practical application in the future. To address this, a transition from microscale to nanoscale is necessary, ensuring compatibility with nanotechnology and nanoelectronics applications [20,21] piezoelectric nanoswitches, which integrate electrical and mechanical properties on the nanoscale, collectively termed NEMS, a category encompassing nanotechnologies [21,90,91]. However, NEMS devices are still in the research and development phase, necessitating a thorough exploration of electricalmechanical interactions within NEMS arrays and their switching times [22,23].…”
Section: Piezoelectric Nanoswitch Applicationsmentioning
confidence: 99%
“…The rise of nano-robots and their diverse applications [16][17][18], along with the utilization of nanotechnology in radars, sensors, and cameras [19], has created a demand for downsizing piezoelectric switches from the microscale to the nanoscale [20,21]. Achieving this goal requires transitioning from micro-electro-mechanical systems (MEMS) to nanoelectro-mechanical systems (NEMS) for the design of piezoelectric nanoswitches.…”
Section: Introductionmentioning
confidence: 99%