2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings 2011
DOI: 10.1109/edm.2011.6006904
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Nanotexturing of ceramic products surface by means of low-energy electron and laser exposure

Abstract: Results of research of near-surface layer of aluminum oxide ceramics thin plates were presented. Layers were produced by treatment of electron beam (5 keV energy) -electron beam treatment (EBT) -and laser beam (1.06 ȝm wavelength) exposure -laser treatment (LT). The composition and structure of near-surface layer were researched by methods of electron microscopy, X-ray structure analysis and IR Fourier spectroscopy. It was shown that in case of LT the chevron texture occurred as a result of ceramics melting wi… Show more

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