Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

Bhushan, Bharat

doi:10.1016/j.mee.2006.10.059

Cited by 331 publications

(171 citation statements)

References 85 publications

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“…With the development of lithographic microfabrication and micromachining techniques, silicon has become a principal construction material in microelectromechanical systems (MEMS) [1,2]. When the dimensions shrink to nanoscale, the ratio of surface area to volume greatly increases so that the interfacial forces become dominant [3].…”

Section: Introductionmentioning

confidence: 99%

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

et al. 2013

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Abstract:Using an atomic force microscope, the running-in process of a single crystalline silicon wafer coated with native oxide layer (Si-SiO x ) against a SiO 2 microsphere was investigated under various normal loads and displacement amplitudes in ambient air. As the number of sliding cycles increased, both the friction force F t of the Si-SiO x /SiO 2 pair and the wear rate of the silicon surface showed sharp drops during the initial 50 cycles and then leveled off in the remaining cycles. The sharp drop in F t appeared to be induced mainly by the reduction of adhesion-related interfacial force between the Si-SiO x /SiO 2 pair. During the running-in process, the contact area of the Si-SiO x /SiO 2 pair might become hydrophobic due to removal of the hydrophilic oxide layer on the silicon surface and the surface change of the SiO 2 tip, which caused the reduction of friction force and the wear rate of the Si-SiO x /SiO 2 pair. A phenomenological model is proposed to explain the running-in process of the Si-SiO x /SiO 2 pair in ambient air. The results may help us understand the mechanism of the running-in process of the Si-SiO x /SiO 2 pair at nanoscale and reduce wear failure in dynamic microelectromechanical systems (MEMS).

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Section: Introductionmentioning

confidence: 99%

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

et al. 2013

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“…Therefore, it is extremely difficult to apply techniques learned in MEMS to the fabrication of even smaller NEMS devices. This is also evidenced by the restricted sizes of MEMS motors of millimetres to hundreds of micrometres [16][17][18] . Few can reach tens of micrometres and very few can make truly nanoscale motors even using the best available techniques 12,13,19 .…”

mentioning

confidence: 99%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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The development of rotary nanomotors is crucial for advancing nanoelectromechanical system technology. In this work, we report design, assembly and rotation of ordered arrays of nanomotors. The nanomotors are bottom-up assembled from nanoscale building blocks with nanowires as rotors, patterned nanomagnets as bearings and quadrupole microelectrodes as stators. Arrays of nanomotors rotate with controlled angle, speed (over 18,000 r.p.m.), and chirality by electric fields. Using analytical modelling, we reveal the fundamental nanoscale electrical, mechanical and magnetic interactions in the nanomotor system, which excellently agrees with experimental results and provides critical understanding for designing metallic nanoelectromechanical systems. The nanomotors can be continuously rotated for 15 h over 240,000 cycles. They are applied for controlled biochemical release and demonstrate releasing rate of biochemicals on nanoparticles that can be precisely tuned by mechanical rotations. The innovations reported in this research, from concept, design and actuation to application, are relevant to nanoelectromechanical system, nanomedicine, microfluidics and lab-on-a-chip architectures.

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“…These values of velocity represent the velocities commonly encountered in MEMS/NEMS devices (Ping and NingBo 2007;Karthikeyan et al 2009;Pei et al 2007). For example, a high temperature micro gas turbine has a rotational speed that would translate into a sliding velocity of over 500 m/s (Bhushan 2007). An important observation of this work was that for the sliding velocity of 50 and 100 m/s, due to the sudden acceleration of the asperity atoms in the x-direction at the start of the simulation, the upper asperity oscillated about its center as it travelled towards and across the lower asperity.…”

Section: Effect Of Sliding Velocity Vmentioning

confidence: 99%

Molecular scale analysis of dry sliding copper asperities

2014

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A fundamental characterization of friction requires an accurate understanding of how the surfaces in contact interact at the nano or atomic scales. In this work, molecular dynamics simulations are used to study friction and deformation in the dry sliding interaction of two hemispherical asperities. The material simulated is copper and the atomic interactions are defined by the embedded atom method potential. The effect of interference, d, relative sliding velocity, v, asperity size, R, lattice orientation, h, and temperature control, on the friction characteristics are investigated. Extensive plastic deformation and material transfer between the asperities were observed. The sliding process was dominated by adhesion and resulted in high effective friction coefficient values. The friction force and the effective friction coefficient increased with the interference and asperity size but showed no significant change with an increase in the sliding velocity or with temperature control. The friction characteristics varied strongly with the lattice orientation and an average effective friction coefficient was calculated that compared quantitatively with existing measurements.

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Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

Cited by 331 publications

References 85 publications

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Molecular scale analysis of dry sliding copper asperities

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