Certain micro-devices require sliding contact between components; micro-engines, micro-motors, micro-gears, and near-contact or contact recording hard disk drives are some examples. In these devices tribological problems--namely friction, wear and stiction-determine device efficiency and lifetime. Newly developed carbon films show ultra low friction (lower than 0.05), low wear coefficient (lower than 10 -8 ), and high contact angle of water (higher than 85 degrees). This film has very low adherent property that results in ultra low friction and high contact angle. The hardness and elastic modulus are lower than H-DLC but the ratio of hardness to modulus is similar to values for H-DLC that results in low wear rate. Even though these carbon film has low hardness (2 to 10 GPa), it can be used as a protective layer in micro-devices because the X applied load is very light and contact area is large in micro-device applications. A new oscillating compliant beam method was used to measure friction and wear.