Nanowatt Thermal Radiation Sensing using Silicon Nitride Nanomechanical Resonators

Snell, Nikaya; Zhang, Chang; Mu, Gengyang; St-Gelais, Raphaël

doi:10.1109/pn50013.2020.9167002

Cited by 3 publications

(2 citation statements)

References 3 publications

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“…Later in 2013, nanomechanical photothermal detector concepts based on tensioned SiN strings [7], [8] have been introduced. Recently, this concept has been developed further to be used as an infrared detector based on a SiN drum featuring a broadband infrared absorber thin film [9] and without a dedicated absorber [10], [11]. It has been shown that these drum resonators can reach an intrinsic sensitivity in the fW-regime [12].…”

Section: Introductionmentioning

confidence: 99%

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Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators

et al. 2023

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Nanoelectromechanical (NEMS) resonators are promising uncooled thermal infrared (IR) detectors to overcome existing sensitivity limits. Here, we investigated nanoelectromechanical trampoline resonators made of silicon nitride (SiN) as thermal IR detectors. Trampolines have an enhanced responsivity of more than two orders of magnitude compared to state-of-the-art SiN drums. The characterized NEMS trampoline IR detectors yield a sensitivity in terms of noise equivalent power (NEP) of 7 pW/ √ Hz and a thermal response time as low as 4 ms. The detector area features an impedance-matched metal thin-film absorber with a spectrally flat absorption of 50% over the entire mid-IR spectral range from 1 µm to 25 µm.

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Section: Introductionmentioning

confidence: 99%

“…We demonstrate trampoline structures made of SiN as enhanced NEMS-based infrared detectors. Compared to other SiN [9], [11], [39] or piezoelectric [17], [18] nanomechanical resonators as infrared detectors with sensitivities in the range of hundreds of pW/…”

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confidence: 99%