A kind of high electron mobility transistor (HEMT) of heterojunction with nanocrystalline Si film with crystalline Si layer (nc-Si/c-Si) was designed in this paper. Based on the output current model of HEMT, the influence of densities for interface charge states (n) at junction and mean sizes (d) of nanocrystalline Si in the film on the drain current (I DS ) from the devices was analyzed by numerical simulation. The results indicate that I DS of the HEMTs increases with the n and d. Furthermore, the breakdown voltage (V BR ) and pinch-off voltage (V P ) vary with n and d. In addition, the device transconductance (g m ) relates closely to gate voltage (V GS ) and n.