2012
DOI: 10.1364/oe.20.021917
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Narrowband multispectral filter set for visible band

Abstract: We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400-750 nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mi… Show more

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Cited by 32 publications
(20 citation statements)
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“…Such a device makes possible in situ spectral measurement of NIR spectra ranging from 722 nm to 880 nm. Walls et al designed, fabricated and characterized a 23-band MSFA of narrowband Fabry–Pérot filters with FWHM (full-width half-maximums) of 22–46 nm, covering the visible range (400–750 nm) [ 73 ]. The fabrication is suitable for direct integration onto CMOS image sensors in industrial foundries, and the cost and complexity is reduced in comparison with other solutions that vary the physical cavity length only.…”
Section: State-of-the-artmentioning
confidence: 99%
“…Such a device makes possible in situ spectral measurement of NIR spectra ranging from 722 nm to 880 nm. Walls et al designed, fabricated and characterized a 23-band MSFA of narrowband Fabry–Pérot filters with FWHM (full-width half-maximums) of 22–46 nm, covering the visible range (400–750 nm) [ 73 ]. The fabrication is suitable for direct integration onto CMOS image sensors in industrial foundries, and the cost and complexity is reduced in comparison with other solutions that vary the physical cavity length only.…”
Section: State-of-the-artmentioning
confidence: 99%
“…Because the transmission peak at the FP resonance is determined by the cavity length, different color filters need different insulator thickness, which results in multiple-step patterning if various etalon color filters are integrated. To solve this issue, we investigated a modified etalon color filter, in which the top metal mirror and the insulator layer were etched into subwavelength holes and filled with PMMA [39]. Because the hole size is smaller than the light wavelength, it can be treated as an effective material.…”
Section: Metal-insulator-metal (Mim) Resonator Color Filtersmentioning
confidence: 99%
“…1. Various research directions have been explored: filter characteristics [8][9][10][11], adequate full resolution image processing, e.g. demosaicing [12][13][14][15][16][17], and other aspects [18,19].…”
Section: Introductionmentioning
confidence: 99%